Influence of Fabrication Parameters on Crystallization, Microstructure, Surface Composition, and Optical Behavior of MgO Thin Films Deposited by rf Magnetron Sputtering

Systematic Evolution of Optical Bandgap and Local Chemical State in Transparent MgO and HfO2 Resistive Switching Materials

“…[ 17,18 ] Further, the XRD data of MgO thin film, shown in Figure 2b, suggests the crystalline structure with cubic phase. [ 19 ] Different characteristic peaks at 36°, 42°, 62° corresponding to Miller indices (111), (200), and (220), respectively, were verified with reported work. [ 20 ]…”

“…The more strong peak belongs to Mg(OH) 2 , which has a binding energy of 49.3 eV, whereas the other peak, with a binding energy of 50.9 eV, indicates lattice Mg in MgO. [ 19,24 ] Further, the O 1s core‐level spectrum was deconvoluted into two peaks, depicted in Figure 4c. The major peak (at the binding energy of 529.5 eV) and minor peak (at 531.6 eV) were owing to oxygen in Mg–O bonds and Mg(OH) 2 , [ 1,6 ] respectively.…”