Influence of deposition parameters on physico-chemical and optical properties of sputtered PbTiO₃ thin films

Characterization of optical properties of nanocrystalline doped PZT thin films

“…2 Together with the properties of the substrate material and PZT thin-film thickness, the optical properties are greatly affected by the crystal structure, orientation of the crystals, the grain size distribution, packing density, and the morphology of the film surface. 3,4 Some of these parameters are also strongly dependent on the film deposition and the thermal heat-treatment processes. In the case of polycrystalline PZT films grown by PLD, the films are typically composed of nanometer sized crystals.…”

Magnetron Sputtered Lead Titanates Thin Films for Pyroelectric Applications: Part 1: Epitaxial Growth, Material Characterization

“…In other words, with an appropriate combination of the Ts and x, single-phase perovskite films can be prepared at low temperatures. Films have the correct Pb stoichiometry for x = 0.8 when 600 < Ts < 650 • C and for x = 1, when 650 < Ts < 680 • C, while for For x = 0.54, with 0.54 PbO + 1TiO 2 and P = 100 mT [58] the film's (Pb/Ti) remains constant at a value close to one, in the temperature range 550 • C < Ts < 600 • C. This self-stabilization effect, i.e., the saturation of the film's lead content at the stoichiometric composition for a given growth temperature range, which has also been observed for the lead titano-zirconate films, is attributed to the preferential re-evaporation of the volatile lead oxide (PbO) species from the perovskite film during the deposition process. At higher growth temperatures, the re-evaporated lead flux must increase in order to obtain a correct lead stoichiometry of (Pb/Ti) = 1, For x = 0.54 and P = 100 mT, analysis of X-ray diffraction patterns of the poly films reveals that the films grown at 600 • C assume a preferred (111) orientation, while the poly films prepared at Ts = 550 • C Ts do not find any preferential orientation [57].…”

“…Dependence of the PT film's atomic ratio on the target's lead content; Jaber et al [56,58] employed RF magnetron sputtering with in situ heating to prepare Stoichiometric, polycrystalline, transparent, and crack-free PT thin films on (0001) sapphire substrates. A summary of the growth parameters is given in Table 1.…”

“…Figure 6 shows the variation of v(Ts), for three targets with 𝑥 = 0.54, 0.8, and 1. variations in v can be divided into four regions: In region I, (0 < 𝑇𝑠 < 500 °C), the v of 𝑣 is almost independent of Ts, while it increases nearly linearly with the increase i In region II, v decreases rapidly with Ts and the variation is more pronounced for the rich films (i.e., films obtained from targets with 𝑥 = 0.8 and 𝑥 = 1) [58]. Figure 6 shows the variation of v(Ts), for three targets with x = 0.54, 0.8, and 1.…”

Stress and Film Thickness Effects on the Optical Properties of Ferroelectric Pb(ZrxTi1 −x)O3Films

“…Surface roughness incurring Rayleigh scattering is detrimental for the optical properties of these devices. Together with the properties of the substrate material and Pb(Zr x Ti 1−x )O 3 (i.e., PZT) thin-film thickness, the optical properties are greatly affected by the crystal structure, orientation of the crystals, the grain size distribution, packing density and the morphology of the film surface [1,2]. Some of these parameters are also strongly dependent on the film deposition and the thermal heat-treatment processes.…”