Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography

Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B_4C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B_4C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.

Section: экспериментальные результатыunclassified

“…Осажденный на поверхность серебра кремний заметно сглаживает и другую границу. Видимо в случае Ag/Y имеет место тот же эффект, что отмечен в [14][15][16].…”

Section: экспериментальные результатыunclassified

Многослойные зеркала Ag/Y для спектрального диапазона 9-11 nm

Квашенников¹,

Зуев²,

Полковников³

et al. 2019

“…Прекращенные в конце 1990-х годов работы по изучению свойств бериллий-содержащих МЗ были возобновлены в 2014 г. в ИФМ РАН, где создана уникальная бериллиевая лаборатория [9]. В ходе исследований на длине волны 11.3 nm для МЗ на основе Mo/Be был получен коэффициент отражения 70.25% [10], что совпадает с результатами, ранее опубликованными в [7].…”

Section: Introductionunclassified

Микроструктура Переходных Границ В Многослойных Мо/Ве-Системах

Смертин¹,

Полковников²,

Салащенко³

et al. 2020

The microstructure of Mo / Be multilayer periodic systems was studied by X-ray reflectivity and diffractometry and EXAFS spectroscopy. It was found that in the Mo / Be system, mixed zones of different compositions form at the boundaries. At the Mo-on-Be border, there is a mixed zone, similar in composition to MoBe22, and at the Be-on-Mo border, with MoBe2. As a result of thermal annealing for one hour, the structure of the transition boundaries in the multilayer system remains stable. With further annealing, diffusion processes occur that lead to the formation of another compound at the interface — MoBe2, instead of MoBe22, however, the period of the structure remains unchanged. This behavior explains the increase in the reflection coefficient of Mo / Be mirrors after annealing for one hour and a further decrease in the reflection coefficient with a longer annealing time.

“…Зеркала на основе бериллия привлекают к себе внимание благодаря экспериментально полученным высоким, более 70%, коэффициентам отражения вблизи края поглощения бериллия (11.1 nm) [9,10]. В последнее время интерес к этой паре материалов вновь возрос в связи .…”

unclassified

Влияние термического отжига на свойства многослойных зеркал Mo/Be

Smertin¹,

Гарахин²,

Зуев³

et al. 2019

Self Cite

The influence of thermal action on X-ray optics performance and structure of films and transition regions in multilayer Mo/Be mirrors optimized for a reflection maximum in the interval 11.2–11.4 nm at normal incidence has been considered. The annealing temperature reached 300°C and the annealing time was 1 and 4 h. It has been shown that after thermal annealing in vacuum for 1 h at 300°C, the reflection coefficient rises; however, when the annealing time grows to 4 h, it drops. Grains in molybdenum films become finer, and the profiles of transition regions change from exponential to linear. The period of multilayer mirrors has remained the same under all annealing conditions.