“…129,130 So far, sputtering has been the most reported PVD technique to deposit Nb 2 O 5 lms. Generally, Nb 2 O 5 lms can be obtained using direct current (DC) 72,[131][132][133][134][135][136] or radio frequency (RF) 18,132,[137][138][139][140][141][142][143] sputtering techniques with metallic niobium (Nb) 72,131,[133][134][135][138][139][140][141][142][144][145][146] or Nb 2 O 5 (ref. 18, 137 and 143) targets in the presence of carrier gases such as argon (Ar) in oxygen (O 2 ) environments.…”