Influence of a magnetic field on the cathode fall space in a discharge with a cylindrical hollow cathode

Abstract

Results of experimental research on the cathode sheath thickness in a hollow (cylindrical) cathode discharge in magnetic field are presented. Experimental results are explained by analysing the motion of cathode electrons in the cathode fall space.

The use of hollow cathodes in deposition processes: A critical review

“…Since in the hollow cathode, electrons are not as easily lost to ground as in the case of the planar magnetron, it is not completely clear how the magnetic field increases ionization. However, the use of magnetic fields has been reported to increase the plasma density and, correspondingly, the plasma current [195][196][197][198][199][200][201][202][203][204].…”

“…Under these conditions, the electrons are confined close to the cathode surface and fundamentally alter the structure and parameters of the sheath [3,195,196,199,205,206].…”