The use of hollow cathodes in deposition processes: A critical review

Mühl, S.; Pérez, Argelia

doi:10.1016/j.tsf.2015.02.066

Cited by 123 publications

(59 citation statements)

References 284 publications

(300 reference statements)

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“…and plasma source (ICP, ECR, Magnetron, HWS, etc.) in addition to geometrical effects provided by electrodes when setting up the plasma reactor [6]. In this context, the capacitively coupled radiofrequency (CCRF) discharge with parallel plate electrodes has been largely used for plasma processing applications [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Djerourou

Djebli

Ouchabane

2019

Eur. Phys. J. Appl. Phys.

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This work deals with a comparative study of plasma discharge generated by two geometrical configurations of cathodes through an investigation of their plasma parameters. A large hole diameter and depth (D = 40 mm, W = 50 mm) multi-hollow (MH) cathode compared with a plane (PL) cathode are presented for argon capacitively coupled radiofrequency discharge. The electrical characteristics of MH and PL cathodes have been measured in terms of the self-bias voltage (Vdc) while the Langmuir probe was used to measure electron density (ne) and electron temperature (Te) for a wide range of gas pressure (60–400 mTorr) and incident power (50–300 W). It is found that the hollow cathode effect (HCE) is optimum at 60 mTorr with 220 mTorr as a critical gas pressure for which a transition from HCE to insufficient HCE is seen. The electron temperature varies from 3 to 5 eV in the case of MH and PL cathodes with respect to incident power and gas pressure.

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Section: Introductionmentioning

confidence: 99%

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Djerourou

Djebli

Ouchabane

2019

Eur. Phys. J. Appl. Phys.

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“…To begin, we recognize the high‐energy e‐beams used to generate the plasma in this work were extracted from a hollow cathode discharge. In these discharges, the discharge current depends on the cathode geometry, applied voltage, and gas pressure . Despite the differences in geometry of the cathodes studied here, Figure shows a similar increase in discharge current with increasing pressure in both systems.…”

Section: Resultsmentioning

confidence: 67%

Correlating charge fluence with nanoparticle formation during in situ plasma synthesis of nanocomposite films

Ghosh

Boris

Hernández

et al. 2017

Plasma Processes & Polymers

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Plasmas enable the fabrication of nanocomposites via in situ reduction of metal precursors dispersed in polymer films. The mechanism for reduction has not yet been revealed and it is not known how plasma parameters affect nanoparticle formation. Here, we present a systematic study using a low‐pressure, pulsed electron beam generated argon plasma to treat silver cation‐containing polyacrylic acid films. The background pressure, treatment time, period, and pulse width are varied to influence charged species generation. We show a direct correlation between nanoparticle density, as assessed by ultraviolet‐visible absorbance analysis, and the charge fluence. Although the experiments could not separate the specific role of ions and electrons, our results demonstrate the importance of charged species to nanoparticle formation.

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“…This is known as the hollow cathode effect and gives a high cathode current with corresponding increase in plasma density. [13], [14] Another important feature of the hollow cathode design is the fact that the gas is trapped and cannot become rarefied as in an open magnetron, which makes it possible to achieve a super-saturated metal vapor in the hollow cathode. [15] This high density of sputtered material is especially important for the growth of nanoparticles, as will be explained in the section on nanoparticle growth.…”

Section: Hollow Cathode Sputteringmentioning

confidence: 99%

Plasma Synthesis and Self-Assembly of Magnetic Nanoparticles

Ekeroth

2019

Linköping Studies in Science and Technology. Dissertations

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ii Cover image: Fe nanoparticles collected into nanotrusses on top, and around the edges, of a Si wafer. Abstract Nanomaterials are important tools for enabling technological progress as they can provide dramatically different properties as compared to the bulk counterparts. The field of nanoparticles is one of the most investigated within nanomaterials, thanks to the existing, relatively simple, means of manufacturing. In this thesis, high-power pulsed hollow cathode sputtering is used to nucleate and grow magnetic nanoparticles in a plasma. This sputtering technique provides a high degree of ionization of the sputtered material, which has previously been shown to aid in the growth of the nanoparticles. The magnetic properties of the particles are utilized and makes it possible for the grown particles to act as building blocks for selfassembly into more sophisticated nanostructures, particularly when an external magnetic field is applied. These structures created are termed "nanowires" or "nanotrusses", depending on the level of branching and inter-linking that occurs.Several different elements have been investigated in this thesis. In a novel approach, it is shown how nanoparticles with more advanced structures, and containing material from two hollow cathodes, can be fabricated using high-power pulses. The dual-element particles are achieved by using two distinct and individual elemental cathodes, and a pulse process that allows tuning of individual pulses separately to them. Nanoparticles grown and investigated are Fe, Ni, Pt, Fe-Ni and Ni-Pt. Alternatively, the addition of oxygen to the process allows the formation of oxide or hybrid metal oxidemetal particles. For all nanoparticles containing several elements, it is demonstrated that the stoichiometry can be easily varied, either by the amount of reactive gas let into the process or by tuning the amount of sputtered material through adjusting the electric power supplied to the different cathodes.One aim of the presented work is to find a suitable material for the use as a catalyst in the production of H2 gas through the process of water splitting. H2 is a good candidate to replace fossil fuels as an energy carrier. However, rare elements (such as Ir or Pt) needs to be used as the catalyst, otherwise a high overpotential is required for the splitting to occur, leading to a low efficiency. This work demonstrates a possible route to avoid this, by using nanomaterials to increase the surface-to-volume ratio, as well as optimizing the elemental ratio between different materials to lower the amount of noble elements required.iv v

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The use of hollow cathodes in deposition processes: A critical review

Cited by 123 publications

References 284 publications

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Correlating charge fluence with nanoparticle formation during in situ plasma synthesis of nanocomposite films

Plasma Synthesis and Self-Assembly of Magnetic Nanoparticles

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