2007
DOI: 10.1016/j.optcom.2007.06.049
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Influence of a carbon over-coat on the X-ray reflectance of XEUS mirrors

Abstract: We describe measurements of the X-ray reflectance in the range 2 to 10 keV of samples representative of coated silicon wafers that are proposed for the fabrication of the XEUS (X-ray Evolving Universe Spectrometer) mission. We compare the reflectance of silicon samples coated with bare Pt, with that for samples with an additional 10nm thick carbon over-coating. We demonstrate a significant improvement in reflectance in the energy range ~1 to 4 keV, and at a grazing incidence angle of 10 mrad (0.57°). We consid… Show more

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Cited by 26 publications
(15 citation statements)
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“…The SPO development in the past focused on demonstrating in a holistic approach the entire production chain, from wafer up to optical bench level, at one focal length and radius, on which we reported extensively in [18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33]. This included a complete set of environmental tests on mirror module level, resulting in a technology readiness level (TRL) of ~5 at the current stage.…”
Section: Technology Developmentmentioning
confidence: 99%
“…The SPO development in the past focused on demonstrating in a holistic approach the entire production chain, from wafer up to optical bench level, at one focal length and radius, on which we reported extensively in [18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33]. This included a complete set of environmental tests on mirror module level, resulting in a technology readiness level (TRL) of ~5 at the current stage.…”
Section: Technology Developmentmentioning
confidence: 99%
“…High-Z metallic coatings such as platinum, tungsten, gold, or iridium are typically used to increase the reflectivity [24]. Patterning of the coated surface by metallic masks [25] or lithographic processes [21] is necessary to ensure bondability of the silicon mirror plates during the stacking process.…”
Section: Production Of Silicon Porementioning
confidence: 99%
“…We have developed two methods to apply structured coatings and have demonstrated stacks with Ir and C overcoating [18], W and Pt coatings. We have performed reflectometry to demonstrate that the silicon plates, after all processing steps and including coating have a rms surface roughness of 0.48 nm [17].…”
Section: Figure 5 First Pull Tests Performed On Bonded Plates (Left)mentioning
confidence: 99%
“…We have performed reflectometry to demonstrate that the silicon plates, after all processing steps and including coating have a rms surface roughness of 0.48 nm [17]. The development of wedged plates has led to plates [18] which are now also able to meet the requirements of IXO, which needs a 2.5 times larger wedge angle than XEUS as the wedge angle is proportional to the plate thickness over focal length. Simultaneously, it has been possible to reduce the cost per plate [18] and to test including additional features like integrated baffles.…”
Section: Figure 5 First Pull Tests Performed On Bonded Plates (Left)mentioning
confidence: 99%
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