Influence of a Buffer Layer on the Formation of a Thin-Film Nickel Catalyst for Carbon Nanotube Synthesis

Bulyarskiy, S. V.; Zenova, E. V.; Lakalin, A. V.; Molodenskii, M. S.; Pavlov, A. A.; Tagachenkov, A. M.; Terent’ev, A. V.

doi:10.1134/s1063784218120253

Cited by 10 publications

(4 citation statements)

References 16 publications

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“…Therefore, the average size of nickel nanoparticles on the surface of the TiN barrier layer increases, and the dispersion of the distribution of nanoparticles over their diameter increases, since increased wetting stimulates the development of the coalescence phenomenon, which consists in the coalescence of small nanodroplets into large ones. This leads to an increase in average diameters and, as a consequence, an increase in the diameter of future CNT, since their diameters are proportional to each other [25]. Thus, for the formation of catalyst nanoparticles, it is desirable to choose the most smooth surfaces that are not wetted by the catalyst melt.…”

Section: Discussionmentioning

confidence: 99%

“…To prevent this, a barrier layer is added between the silicon and the catalyst metal. Titanium, tantalum or niobium nitrides are often used as barrier layers, because they have conductive properties and weakly interact with catalyst metals [10]. Nanoparticles are formed from nanodrops of a melted thin catalyst film 2−4 nm thick deposited on the surface of the barrier layer.…”

Section: Introductionmentioning

confidence: 99%

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Effect of Barrier Layer Roughness on the Formation of Nanoparticles of the Carbon Nanotube Growth Catalyst

Bulyarsky S. V.,

Dudin A. A.,

Litvinova K. I.

et al. 2023

Physics of the Solid State

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This article compares TiN layers produced by electron beam evaporation (EBE) and atomic layer deposition (ALD) for the effect of barrier layer deposition technology on the formation of carbon nanotube (CNT) growth catalyst nanoparticles. The layers obtained by EBE have a roughness 1.5 times higher than the layers deposited by the ALD method (Ra=1 nm and Ra=0.6 nm). Nanoparticles formed on the surface of the EBE layer are characterized by a large average size (about 30 nm) and a 1.3 times greater dispersion of the distribution compared to nanoparticles formed on the ALD layer. TiN layers obtained by EBE are characterized by better surface wettability in comparison with ALD layers. The contact angle for catalyst nanoparticles on the surface of the EBE layer of TiN is about 30 degrees and approaches 90 degrees for ALD layers. Catalyst spreading is due to the Wenzel model. It is shown that the higher surface roughness of the EBE samples is associated with the crystallization of TiN, since the layer formation process proceeds at a higher temperature compared to the ALD process. For this reason, the use of barrier layers obtained by the ALD method is preferable for the formation of CNT growth catalyst nanoparticles on their surface. Keywords: electron beam evaporation, atomic layer deposition, roughness, wetting, catalyst nanoparticles.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Effect of Barrier Layer Roughness on the Formation of Nanoparticles of the Carbon Nanotube Growth Catalyst

Bulyarsky S. V.,

Dudin A. A.,

Litvinova K. I.

et al. 2023

Physics of the Solid State

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“…Поэтому средний размер наночастиц никеля на поверхности барьерного слоя TiN увеличивается, а дисперсия распределения наночастиц по их диаметру увеличивается, так как усиление смачивания стимулирует развитие явления коалесценции, заключающееся в слиянии мелких нанокапель в большие. Это приводит к увеличению средних диаметров и, как следствие, увеличению диаметра будущих УНТ, так как их диаметры пропорциональны друг другу [25]. Таким образом, для формирования наночастиц катализатора желательно выбирать максимально гладкие поверхности, которые не смачиваются расплавом катализатора.…”

Section: заключениеunclassified

“…Для исключения этого, между кремнием и металлом катализатора добавляется барьерный слой. Часто в качестве барьерных слоев используются нитриды титана, тантала либо ниобия, т. к. они обладают проводящими свойствами и слабо взаимодействуют с металлами катализатора [10]. Наночастицы формируются из нанокапель расплавленной тонкой пленки катализатора толщиной 2−4 nm, нанесен-ной на поверхность барьерного слоя.…”

Section: Introductionunclassified

Влияние Шероховатости Барьерного Слоя На Формирования Наночастиц Катализатора Роста Углеродных Нанотрубок

Булярский¹,

Дудин²,

Литвинова³

et al. 2023

Физика Твердого Тела

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This article compares TiN layers produced by electron beam evaporation (EBE) and atomic layer deposition (ALD) for the effect of barrier layer deposition technology on the formation of carbon nanotube (CNT) growth catalyst nanoparticles. The layers obtained by EBE have a roughness 1.5 times higher than the layers deposited by the ALD method (Ra = 1 nm and Ra = 0.6 nm). Nanoparticles formed on the surface of the EBE layer are characterized by a large average size (about 30 nm) and a 1.3 times greater dispersion of the distribution compared to nanoparticles formed on the ALD layer. TiN layers obtained by EBE are characterized by better surface wettability in comparison with ALD layers. The contact angle for catalyst nanoparticles on the surface of the EBE layer of TiN is about 30 degrees and approaches 90 degrees for ALD layers. Catalyst spreading is due to the Wenzel model. It is shown that the higher surface roughness of the EBE samples is associated with the crystallization of TiN, since the layer formation process proceeds at a higher temperature compared to the ALD process. For this reason, the use of barrier layers obtained by the ALD method is preferable for the formation of CNT growth catalyst nanoparticles on their surface.

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Formation of catalyst particles for the CNT growth from thin films: Experiment and simulation

Bulyarskiy,

Dudin,

L'vov

et al. 2024

Chemical Physics

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Influence of a Buffer Layer on the Formation of a Thin-Film Nickel Catalyst for Carbon Nanotube Synthesis

Cited by 10 publications

References 16 publications

Effect of Barrier Layer Roughness on the Formation of Nanoparticles of the Carbon Nanotube Growth Catalyst

Effect of Barrier Layer Roughness on the Formation of Nanoparticles of the Carbon Nanotube Growth Catalyst

Влияние Шероховатости Барьерного Слоя На Формирования Наночастиц Катализатора Роста Углеродных Нанотрубок

Formation of catalyst particles for the CNT growth from thin films: Experiment and simulation

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