Abstract:This study develops a diffuser micropump and characterizes its output flow rates, such as the parabola shape on the frequency domain and the affecting factors. First, an equivalent circuit using electronic-hydraulic analogies was constructed. Flow rate analysis results were then compared to experimental results to verify the applicability of the circuit simulation. The operational frequency was 800 Hz for both cases and maximum flow rates were 0.078 and 0.075 mul/s for simulation and experimental results, resp… Show more
“…When the driving frequency is very low, it is not essential to consider the influence of the piezoelectric actuator's quality on driving characteristics, but when the driving frequency increases, the quality affects the vibration of the piezoelectric actuator [18]. On the basis of Figure 5(a), an equivalent inductance representing mass inertia is added to the fluid domain side, and the formula for calculating is [17]…”
“…If the depth of the cone tube is 2c, assuming that the width of an infinitely short cone tube is constant, the flow resistance of this infinitely short cone tube can be obtained, According to the definition of the cone tuber's rectification efficiency, the flow resistance of the nozzle is [18] …”
The traditional suction mechanism with an air pump in robotics is difficult to miniaturize. Integrating a piezoelectric pump into a suction cup is an effective method to achieve miniaturization. In this paper, a novel suction cup with a piezoelectric micropump is designed. The micropump is valveless and the suction cup is designed with a laminated structure in order to facilitate miniaturizing and manufacturing. A systematic optimization design method of the suction cup is introduced which addresses the static and dynamic driving characteristics of the piezoelectric actuator and the rectifying efficiency of diffuser/nozzle's optimization. The design is verified via simulation using an improved equivalent electric network model. Static lumped parameters in this model are calculated by the finite element method instead of the traditional analytic method, and the diffuser/nozzle's flow resistance is computed by integrating and introducing rectifying efficiency coefficient. Simulation results indicate that the suction cup can generate a stable negative pressure, and the equivalent electric network model can improve the simulation efficiency and accuracy. The maximum steady-state negative pressure of the suction cup can also be effectively improved after optimization.
“…When the driving frequency is very low, it is not essential to consider the influence of the piezoelectric actuator's quality on driving characteristics, but when the driving frequency increases, the quality affects the vibration of the piezoelectric actuator [18]. On the basis of Figure 5(a), an equivalent inductance representing mass inertia is added to the fluid domain side, and the formula for calculating is [17]…”
“…If the depth of the cone tube is 2c, assuming that the width of an infinitely short cone tube is constant, the flow resistance of this infinitely short cone tube can be obtained, According to the definition of the cone tuber's rectification efficiency, the flow resistance of the nozzle is [18] …”
The traditional suction mechanism with an air pump in robotics is difficult to miniaturize. Integrating a piezoelectric pump into a suction cup is an effective method to achieve miniaturization. In this paper, a novel suction cup with a piezoelectric micropump is designed. The micropump is valveless and the suction cup is designed with a laminated structure in order to facilitate miniaturizing and manufacturing. A systematic optimization design method of the suction cup is introduced which addresses the static and dynamic driving characteristics of the piezoelectric actuator and the rectifying efficiency of diffuser/nozzle's optimization. The design is verified via simulation using an improved equivalent electric network model. Static lumped parameters in this model are calculated by the finite element method instead of the traditional analytic method, and the diffuser/nozzle's flow resistance is computed by integrating and introducing rectifying efficiency coefficient. Simulation results indicate that the suction cup can generate a stable negative pressure, and the equivalent electric network model can improve the simulation efficiency and accuracy. The maximum steady-state negative pressure of the suction cup can also be effectively improved after optimization.
“…2. Note that the electrical formulae used in the simulations to model the hydraulic resistance (R hyd ), inertance (I hyd ) and capacitance (C hyd ) of the various elements within the micropump are presented in Bourouina and Grandchamp (1996), Morganti et al (2005), Hsu and Le (2008) and are therefore omitted here with two considerations that, first, the epoxy layer was considered in the present simulation. Its mass contributes to the membrane inductance as follow (Morganti et al 2005), (Hsu and Le 2008),…”
Section: Equivalent Electrical Circuit Of Micropumpmentioning
confidence: 99%
“…Bourouina and Grandchamp (1996) demonstrated the feasibility of modeling membrane micropumps with two integrated checkvalves using an equivalent electrical network. In more recent studies (Morganti et al 2005) and our lab (Hsu and Le 2008) applied an electronic-hydraulic analogy to convert a valve-less diffuser micropump system into an equivalent electrical circuit and then used the SPICE (simulation program with integrated circuit emphasis) analog circuit package (CircuitMake 6.2 Pro) to analyze its performance and dynamic response. However, to our knowledge, peristaltic micropump (Smits 1990) has not been modeled neither by CFD or equivalent electrical network by mean of the whole system operation due to its excessively complex operation structure.…”
Utilizing an electronic-hydraulic analogy, this study develops an equivalent electrical network of a piezoelectric peristaltic micropump which has not been modeled the whole system operation completely by computational fluid dynamics (CFD) or equivalent electrical network so far due to its excessive complicated structure. The validity of the proposed model is verified by comparing the simulation results obtained using the SPICE (simulation program with integrated circuit emphasis) software package for flow rate spectrum and its maximum state of a typical micropump with the experimental observations for two working fluids, namely DI water and blood. The simulation results predict a maximum flow rate frequency and flow rate of 280 Hz and 43.23 lL/min, respectively, for water, and 210 Hz and 24.12 lL/min for blood. The corresponding experimental results are found to be 300 Hz and 41.58 lL/min for water and 250 Hz and 23.75 lL/min for blood. The relatively poorer agreement between the two sets of results when using blood as the working fluid is thought to be the result of the non-Newtonian nature of blood, which induces a more complex, non-linear flow behavior within the micropump. Having validated the proposed model, the equivalent network is used to perform a systematic analysis of the correlation between the principal micropump design parameters and operating conditions and the micropump performance. The results confirm the validity of the equivalent electrical network model as the first microfluidic modeling tool for optimizing the design of peristaltic micropumps and for predicting their performance.
“…actuator, passive plate, bonding layer thickness) to actuator-membrane performance was reported by Li and Chen (2003) and they showed that the structure thickness significantly affect the actuator-membrane performance and need to be optimized; therefore, thickness consideration was not included to avoid the repeated work. Furthermore, as reported by other researches (Hsu and Le 2008;Lin et al 2007), the actuatormembrane's natural frequency (i.e. resonant frequency) is approximately three order higher than the pump's maximum flow rate frequency; therefore, the impedance curves were not included in the present study.…”
Utilizing a solvent-assisted bonding process, two diffuser-type polymethylmethacrylate (PMMA) peristaltic micropumps are fabricated with a linear array of circular microchambers with a depth and diameter of 15 m and 7 mm, respectively, actuated using either square or circular PZT actuators. Experimental trials are performed to characterize the performance of the two micropumps under driving frequencies ranging from 80 to 150 Vpp and actuation frequencies in the range of 10 Hz to 1 kHz. The results reveal that the micropump with square PZT actuators generates a maximum pumping rate and back pressure of 217 l/min and 9.2 kPa, respectively, while the micropump with circular actuators generates a maximum flow rate of 131 l/min and a back pressure of 2.7 kPa. ANSYS finite element simulations demonstrate two events. First, given an equivalent surface area, the circular actuators undergo a greater displacement than the square actuators under given actuation conditions. In other words, the circular actuator design is more efficient to represent a higher ratio of the displacement to the actuation area (d/A). However, the circular actuators with the surface area of 38.47 mm 2 are smaller than the square actuators (49 mm 2 ). In addition, it is inferred that the relatively poorer performance of the circular actuators is due in part to thermal damage of the PZT patches during their removal from the bulk PZT chip using a laser cutting device in the pump fabrication process. Secondly, when the shape of the effective working area for the actuation is rectangular which is usual in a MEMS design, the rectangular actuator with length of 7 mm has significantly higher displacement (0.71 m) than that of the circular actuator with diameter of 7 mm (0.396 m). Consequently, a rectangular actuator design presents a more practical solution for higher performance of micro-actuators.
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