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2008
DOI: 10.1007/s10404-008-0380-7
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Equivalent electrical network for performance characterization of piezoelectric peristaltic micropump

Abstract: Utilizing an electronic-hydraulic analogy, this study develops an equivalent electrical network of a piezoelectric peristaltic micropump which has not been modeled the whole system operation completely by computational fluid dynamics (CFD) or equivalent electrical network so far due to its excessive complicated structure. The validity of the proposed model is verified by comparing the simulation results obtained using the SPICE (simulation program with integrated circuit emphasis) software package for flow rat… Show more

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Cited by 27 publications
(15 citation statements)
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References 15 publications
(23 reference statements)
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“…Piezoelectrically actuated diaphragms (Koch et al 1998;Park et al 1999;Morris and Forster 2000;Fan et al 2005;Wang et al 2006;Hwang et al 2007;Jang and Yu 2008;Wiederkehr et al 2008;Hsu and Le 2008), which are among the most widely used devices for actuating micropumps, produce relatively large displacement magnitudes and forces and fast mechanical responses. A comparison of various micropump actuation mechanisms shows that piezoelectrically actuated diaphragm micropumps are among those which have high flow rates per unit area (Iverson and Garimella 2008).…”
Section: Displacement Micropumpsmentioning
confidence: 99%
“…Piezoelectrically actuated diaphragms (Koch et al 1998;Park et al 1999;Morris and Forster 2000;Fan et al 2005;Wang et al 2006;Hwang et al 2007;Jang and Yu 2008;Wiederkehr et al 2008;Hsu and Le 2008), which are among the most widely used devices for actuating micropumps, produce relatively large displacement magnitudes and forces and fast mechanical responses. A comparison of various micropump actuation mechanisms shows that piezoelectrically actuated diaphragm micropumps are among those which have high flow rates per unit area (Iverson and Garimella 2008).…”
Section: Displacement Micropumpsmentioning
confidence: 99%
“…Reported micropumps can be classified into two main categories: mechanical micropumps and non-mechanical micropumps. Mechanical micropumps contain moving parts and utilize piezoelectric (Hsu and Le 2009), electrostatic (Bertarelli et al 2011), thermo-pneumatic (Chia et al 2011), pneumatic (Yang et al 2009), optical (Maruo et al 2009) or acoustic (Nguyen et al 2000;Wang et al 2010) to drive the moving parts. These micropumps are still not scalable to achieve portability and miniaturization due to their limits, such as relying on external power supplies or specialized equipments, pulsatile flow, complicated system design, as well as expensive fabrication process (Good et al 2006;Zhang et al 2007;Woias 2005).…”
Section: Introductionmentioning
confidence: 99%
“…More recently, thanks to progress in the computational domain, models can be driven using software such as ANSYS for a complete electro-fluid-solid simulation [4]. Experimental validation of the modeling of a piezoelectric micropump was already reported for a device with no-moving-part valves [5] and a valveless [6] and piezoelectric peristaltic micropump [7]. This paper presents a piezoelectric positive-displacement MEMS micropump having two check valves and a fixed stroke volume [8,9].…”
Section: Introductionmentioning
confidence: 99%