2018
DOI: 10.1007/s10845-018-1399-6
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Industrial feedforward control technology: a review

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Cited by 48 publications
(15 citation statements)
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“…The detailed system information and decoupling process can be referred to [28,29]. One of the on-site temperature control profiles of this etching chamber is shown in Fig.…”
Section: The Process Modelmentioning
confidence: 99%
“…The detailed system information and decoupling process can be referred to [28,29]. One of the on-site temperature control profiles of this etching chamber is shown in Fig.…”
Section: The Process Modelmentioning
confidence: 99%
“…The feedforward controller can effectively decrease the impact of disturbance as compared to feedback control [35]. The feedforward controller has an advantage that is to remove disturbance before entering systems while in a feedback controller disturbances travel through the whole system and are rejected by error of feedback signal [36]. The current system derives a trajectory-based feedforward controller, which uses the dynamics of the mathematical model of the proposed system.…”
Section: Feedforward Controlmentioning
confidence: 99%
“…Predictive machine learning models have been applied to several industrial problems, such as error detection and diagnosis [29][30][31], quality manufacturing [32][33][34], process monitoring [4,35], and manufacturing automation [36,37]. These machine learning models, which include regression methods, decision trees, support vector machines, and artificial neural networks, have shown better performance compared with conventional methods in various situations.…”
Section: Machine Learning Applications To Industrial Problemsmentioning
confidence: 99%