Abstract:Si 1Àx C x nanowires (NWs) were synthesized by varying the ratio of SiH 4 and CH 3 SiH 3 gases using a vapor-liquid-solid (VLS) procedure using Au as a catalyst. The growth rate of the Si 1Àx C x NWs and the change in the wire shape from straight to helical near the Au tip were found to be closely related to the ratio of the CH 3 SiH 3 content. The large concentration of C in the Si 1Àx C x NWs was proportional to the CH 3 SiH 3 content, overcoming the extremely low solubility of C in Si, resulting in an inter… Show more
“…We analyzed the chemical reaction and incorporation of C atoms into the Si lattice and observed interstitially incorporated C atoms in the Si NWs due to cleavage of the Si-C bond from the SiH 3 CH 3 precursor through the Au catalyst during wire growth. 11 Our result is very interesting because generally, it is well known that substitutional incorporation of C atoms into the Si lattice is stable compared to interstitial incorporation. 12,13 Based on previous results for Si 1Àx C x NWs, we attempted to synthesize Si/Si 1Àx C x CS NWs to avoid interstitial incorporation of C atoms while removing the Au catalyst before deposition of the Si 1Àx C x shell on the sidewall of the Si core NW.…”
Section: Introductionmentioning
confidence: 61%
“…The process conditions are well established for the vertical growth of Si NWs using this system. 11 Aer the Si NW growth, the Au tip at the top of the Si NWs was etched by using a KI-I 2 solution for the Si 1Àx C x growth and then rinsed in de-ionized (DI) water. The sample was introduced into the UHV-CVD chamber to deposit the Si 1Àx C x shell on the sidewall of the Si core NW by a CVD method.…”
“…We analyzed the chemical reaction and incorporation of C atoms into the Si lattice and observed interstitially incorporated C atoms in the Si NWs due to cleavage of the Si-C bond from the SiH 3 CH 3 precursor through the Au catalyst during wire growth. 11 Our result is very interesting because generally, it is well known that substitutional incorporation of C atoms into the Si lattice is stable compared to interstitial incorporation. 12,13 Based on previous results for Si 1Àx C x NWs, we attempted to synthesize Si/Si 1Àx C x CS NWs to avoid interstitial incorporation of C atoms while removing the Au catalyst before deposition of the Si 1Àx C x shell on the sidewall of the Si core NW.…”
Section: Introductionmentioning
confidence: 61%
“…The process conditions are well established for the vertical growth of Si NWs using this system. 11 Aer the Si NW growth, the Au tip at the top of the Si NWs was etched by using a KI-I 2 solution for the Si 1Àx C x growth and then rinsed in de-ionized (DI) water. The sample was introduced into the UHV-CVD chamber to deposit the Si 1Àx C x shell on the sidewall of the Si core NW by a CVD method.…”
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