Plasma technology is already used in various applications such as surface treatment, surface coating, reforming of carbon dioxide and methane, removal of volatile organic compounds, odor abatement and disinfection, but treatment processes described in this context do not go beyond laboratory and pilot plant scale. Exemplary applications of both non-thermal plasma and thermal plasma should underline the feasibility of scale-up to industrial application. A non-thermal plasma in modular form was built, which is designed for up to 1000 m³∙h−1 and was successfully practically tested in combination of non-thermal plasma (NTP), mineral adsorber and bio-scrubber for abatement of volatile organic components (VOCs), odorous substances and germs. Thermal plasmas are usually arc-heated plasmas, which are operated with different plasma gases such as nitrogen, oxygen, argon or air. In recent years steam plasmas were gradually established, adding liquid water as plasma gas. In the present system the plasma was directly operated with steam generated externally. Further progress of development of this system was described and critically evaluated towards performance data of an already commercially used water film-based system. Degradation rates of CF4 contaminated air of up to 100% where achieved in industrial scale.