In vitro and in vivo measurement for biological applications using micromachined probe

Kim, Jung-Mu; Oh, Dong-Hoon; Yoon, Jong‐Gul; Cho, Sungjoon; Kim, Namgon; Cho, Jeiwon; Kwon, Youngwoo; Cheon, Changyul; Kim, Yong-Kweon

doi:10.1109/tmtt.2005.857116

Cited by 15 publications

(5 citation statements)

References 15 publications

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“…Every sample is isolated subsequent to the release process and photoresist coating as a passivation layer for the dicing process. RF MEMS transmission lines (3 µm thickness) are fabricated on a quartz substrate and have a semi-coaxial-like structure composed of a BCB layer (20 µm thickness) [5,6,[9][10][11]. Each fabricated component is shown in figure 5(a) and the assembled figure including the jig and SMA connector is shown in figure 5(b).…”

Section: Fabrication Resultsmentioning

confidence: 99%

“…The measured RF characteristics of the transmission line are shown in figure 7; the total length including the transition part is 1.5 cm and the insertion and the return loss is less than −1.5 dB, −18 dB up to 20 GHz, respectively. This half coaxial transmission line shows good RF characteristics, and it can be fabricated by a simple fabrication process compared to the fabrication of the strip line made of BCB [5,6].…”

Section: Micromachined Transmission Linementioning

confidence: 99%

“…Many researchers have developed an RF probe to measure biological information such as a cancer [1][2][3][4]. Our group has also studied methods of measuring the permittivity of biological tissue using an RF MEMS probe [5,6]. Currently, only an RF probe with a single aperture and multiple apertures is implemented.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

Kim¹,

Cheon²,

Kwon³

et al. 2008

J. Micromech. Microeng.

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This paper reports a hybrid RF MEMS probe array system for permittivity measurements. A single-pole triple-throw (SP3T) RF MEMS silicon switch and a novel surface micromachined transmission line with three planar apertures were designed, fabricated and measured. These MEMS devices were connected using wire bonding and bond wire effects were cancelled as a consequence of in-liquid calibration of the whole system. A permittivity measurement of 0.9% saline was made by operating each RF MEMS silicon switch. The measured result showed good agreement with the reference value from the Cole–Cole equation up to 20 GHz. This result shows the feasibility of the proposed hybrid RF MEMS probe array system for permittivity measurements.

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Section: Fabrication Resultsmentioning

confidence: 99%

Section: Micromachined Transmission Linementioning

confidence: 99%

See 1 more Smart Citation

A hybrid RF MEMS probe array system with a SP3T RF MEMS silicon switch for permittivity measurement

Kim¹,

Cheon²,

Kwon³

et al. 2008

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…To deliver large load current with low conduction loss, the transistors of the rectifier are large. Moreover, parasitic capacitance may vary due to changes in the environment [23], [24]. Third, to improve patient the comfort, a flexible substrate is commonly employed for the implanted receiver, which is built with a printed-circuit secondary coil.…”

Section: B Mismatching Of Secondary L 2 C 2 Tankmentioning

confidence: 99%

“…In [22], CDDF was analyzed, and the remedy proposed is to monitor the input current of 𝐿 to correctly demodulate the uplink data within the stipulated operating range of 𝑘. However, in [22], both the TX and RX resonant tanks were required to be perfectly matched, which is challenging to achieve in practice due to variations in parasitic capacitance of secondary coil caused by changes in environment, especially for IMDs applications [23], [24]. Moreover, in [22], parasitic resistances of inductors were not accounted for, which affects the accuracy of the mathematical analysis.…”

Section: Introductionmentioning

confidence: 99%