InP(111) surfaces are sulfurized using vaporized Sb 2 S 3 and Bi 2 S 3 as the providers of S. Temperatures higher than 340 °C are required to substitute the Sb atoms in Sb 2 S 3 with the In atoms from the substrates although such a substitution occurs regardless of the temperature when Bi 2 S 3 is used. In β-In 2 S 3 layers produced as a consequence of the sulfurization, the epitaxial growth takes place not only in the generally favored (103) orientation but also in a sourcedependent additional orientation. The primary coexisting orientation is ( 110) and (109) for using Sb 2 S 3 and Bi 2 S 3 , respectively. The surface free energy is changed by the coverage with Sb and Bi generated in the substitution, giving rise to the alterations of the growth orientation. While the absence of the substitution reaction results in depositing polycrystalline Sb 2 S 3 films at medium temperatures, the deposition is made possible by thermally activated sticking of Sb 2 S 3 species to the InP surfaces. It is also shown that the sulfurization and the deposition of the Sb 2 S 3 films are restricted when excess Sb is added to the Sb 2 S 3 vapor.