2019
DOI: 10.1002/pssa.201800998
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In Situ Transmission Electron Microscopy Study of Molybdenum Oxide Contacts for Silicon Solar Cells

Abstract: In this study, a molybdenum oxide (MoO x ) and aluminum (Al) contact structure for crystalline silicon (c-Si) solar cells is investigated using a combination of transmission line measurements (TLM) and in-situ transmission electron microscopy (TEM). Cross-sectional high-resolution TEM (HRTEM) micrographs reveal a %2 nm silicon oxide (SiO x ) interlayer at c-Si/ MoO x interface in the as-deposited state, indicating that formation of SiO x occurs during deposition of MoO x . Moreover, oxygen diffusion takes plac… Show more

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Cited by 11 publications
(13 citation statements)
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References 23 publications
(30 reference statements)
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“…To study a nanomaterial, one way is to fabricate a device on substrate . For example, Ali et al have recently studied molybdenum oxide contacts for crystalline‐Si (c‐Si) photovoltaic device, using an in situ heating holder (Gatan) in TEM . In this research, a combination of transmission line measurements and in situ TEM was used to investigate a molybdenum oxide (MoO x ) and aluminum contact for crystalline silicon solar cells.…”
Section: Energy Conversionmentioning
confidence: 99%
See 1 more Smart Citation
“…To study a nanomaterial, one way is to fabricate a device on substrate . For example, Ali et al have recently studied molybdenum oxide contacts for crystalline‐Si (c‐Si) photovoltaic device, using an in situ heating holder (Gatan) in TEM . In this research, a combination of transmission line measurements and in situ TEM was used to investigate a molybdenum oxide (MoO x ) and aluminum contact for crystalline silicon solar cells.…”
Section: Energy Conversionmentioning
confidence: 99%
“…In addition, oxygen diffusion takes place at the MoO x /Al interface of MoO x /Al leading to the creation of an interlayer of aluminum oxide of ≈2–3 nm thick. These authors noted that the MoO x /Al contact is rather stable after heating up to 200 °C and maintains the Ohmic contact with sufficiently low resistivity …”
Section: Energy Conversionmentioning
confidence: 99%
“…Previous experiments have shown that when Al is deposited directly onto MoO x , O tends to migrate toward the Al interface and form a thin Al 2 O 3 interlayer. [46] It is evident that no interfacial oxide layer exists at the Ni/MoO x interface.…”
Section: Ultraviolet Photoelectron Spectroscopy Characterizationmentioning
confidence: 99%
“…Additionally, several groups 49–52 report the formation of a relatively thick 2‐ to 3‐nm sub‐stoichiometric silicon oxide (SiO 2 ) interlayer at the (i)a‐Si:H/MoO x interface in the as‐deposited state. More controversial is the instance of MoO x in stack with (i)a‐Si:H or indium tin oxide (ITO).…”
Section: Introductionmentioning
confidence: 99%