In situ real-time annealing of ultrathin vertical Fe nanowires grown by focused electron beam induced deposition

Pablo-Navarro, Javier; Winkler, Robert; Haberfehlner, Georg; Magén, Cesar; Plank, Harald

doi:10.1016/j.actamat.2019.05.035

Cited by 18 publications

(19 citation statements)

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“…In the following decade, strong progress was made in the fabrication, optimization, and application of magnetic materials in general, as comprehensively reviewed by de Teresa et al [24]. Several studies explored the variation in chemical composition as a function of primary electron beam conditions [100,101], patterning parameters [102], gas flux implications [103], and substrate temperatures [101,104]. Co contents up to 95 at.% were found at higher beam currents, primary energies, and elevated temperatures, where the remaining C/O fraction stems from the unavoidable surface oxidation, once the sample is exposed to ambient conditions after processing.…”

Section: Magneticmentioning

confidence: 99%

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank

Winkler

Schwalb³

et al. 2019

Micromachines

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Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.

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Section: Magneticmentioning

confidence: 99%

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank

Winkler

Schwalb³

et al. 2019

Micromachines

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“…In addition, the capability of FEBID for the growth of complex three-dimensional (3D) magnetic structures is being explored in the rising field of 3D nanomagnetism [26].FEBID has long suffered from two disadvantages when compared to other nanofabrication techniques: the material purity and the growth speed. In the last years, various growth strategies and post-growth purification treatments have been successfully developed to enhance the material purity of magnetic deposits that are grown by FEBID [27][28][29][30][31][32]. However, the growth speed of magnetic nanostructures by FEBID continues to be a bottleneck regarding its broader use.…”

mentioning

confidence: 99%

High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced Deposition

Sanz-Martín

Magén

2019

Nanomaterials

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The growth of ferromagnetic nanostructures by means of focused-Ga + -beam-induced deposition (Ga + -FIBID) using the Co 2 (CO) 8 precursor has been systematically investigated. The work aimed to obtain growth conditions allowing for the simultaneous occurrence of high growth speed, good lateral resolution, low electrical resistivity, and ferromagnetic behavior. As a first result, it has been found that the competition between deposition and milling that is produced by the Ga + beam is a limiting factor. In our working conditions, with the maximum available precursor flux, the maximum deposit thickness has been found to be 65 nm. The obtained volumetric growth rate is at least 50 times higher than in the case of deposition by focused-electron-beam-induced deposition. The lateral resolution of the deposits can be as good as 50 nm while using Ga + -beam currents lower than 10 pA. The high metallic content of the as-grown deposits gives rise to a low electrical resistivity, within the range 20-40 µΩ·cm. Magnetic measurements confirm the ferromagnetic nature of the deposits at room temperature. In conclusion, the set of obtained results indicates that the growth of functional ferromagnetic nanostructures by Ga + -FIBID while using the Co 2 (CO) 8 precursor is a viable and competitive technique when compared to related nanofabrication techniques. Nanomaterials 2019, 9, 1715 2 of 12 magnetic resonance force microscopy, in sharp contrast to other nanofabrication techniques requiring resists [19]. Other reported applications of magnetic FEBID deposits comprise nanoactuation [20], domain-wall pinning [21], nano-Hall sensors [22], nanomagnetic logic [23], superconducting-vortex pinning [24,25], etc. In addition, the capability of FEBID for the growth of complex three-dimensional (3D) magnetic structures is being explored in the rising field of 3D nanomagnetism [26].FEBID has long suffered from two disadvantages when compared to other nanofabrication techniques: the material purity and the growth speed. In the last years, various growth strategies and post-growth purification treatments have been successfully developed to enhance the material purity of magnetic deposits that are grown by FEBID [27][28][29][30][31][32]. However, the growth speed of magnetic nanostructures by FEBID continues to be a bottleneck regarding its broader use. Existing literature on the topic indicates that the volumetric growth rate of nanostructures with the widely-used Co 2 (CO) 8 precursor is in the range of 0.002 µm 3 /nC [33]. Low electron currents must be used to obtain magnetic structures with good lateral resolution (below 1 nA), which gives rise to long growth times. As an example, the growth of a 100 nm-thick 1 µm 2 -rectangle takes 8 min. if an electron beam current of 100 pA is used.In the present work, we have systematically explored the possibility of using a Ga + focused ion beam to grow Co magnetic nanostructures with good lateral resolution, low electrical resistance, and high growth speed by means of the Focused Ion Beam Induced De...

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“…The most notorious is the post-growth electron-stimulated purification of 3D gold nanodeposits in a water atmosphere to produce virtually pure functional plasmonic nanostructures [21]. In the case of ferromagnetic deposits, the most recent efforts have focused on high-vacuum thermal annealing of 3D Co [49] and Fe [50] nanowires, with different results depending on the precursor and the as-grown metallic content of the deposits.…”

Section: Purification By Thermal Annealingmentioning

confidence: 99%

“…Moreover, the surface-to-volume ratio also increases significantly, so surface properties become more relevant in 3D nanostructures. This work reviews different possibilities to engineer the geometrical, compositional and magnetic properties of 3D ferromagnetic nanowires grown by FEBID, which can be summarized in three main approaches: (1) fine-tuning of FEBID growth parameters to modify the composition and dimensions [47], (2) the growth of core-shell heterostructures [48], and (3) purification by thermal annealing [49,50].…”

Section: Introductionmentioning

confidence: 99%

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Focused-Electron-Beam Engineering of 3D Magnetic Nanowires

Magén

Pablo-Navarro

2021

Nanomaterials

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Focused-electron-beam-induced deposition (FEBID) is the ultimate additive nanofabrication technique for the growth of 3D nanostructures. In the field of nanomagnetism and its technological applications, FEBID could be a viable solution to produce future high-density, low-power, fast nanoelectronic devices based on the domain wall conduit in 3D nanomagnets. While FEBID has demonstrated the flexibility to produce 3D nanostructures with almost any shape and geometry, the basic physical properties of these out-of-plane deposits are often seriously degraded from their bulk counterparts due to the presence of contaminants. This work reviews the experimental efforts to understand and control the physical processes involved in 3D FEBID growth of nanomagnets. Co and Fe FEBID straight vertical nanowires have been used as benchmark geometry to tailor their dimensions, microstructure, composition and magnetism by smartly tuning the growth parameters, post-growth purification treatments and heterostructuring.

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In situ real-time annealing of ultrathin vertical Fe nanowires grown by focused electron beam induced deposition

Cited by 18 publications

References 50 publications

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced Deposition

Focused-Electron-Beam Engineering of 3D Magnetic Nanowires

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