1992
DOI: 10.1016/s0022-3115(09)80113-x
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In-situ observation of damage evolution in SiC crystals during He+ and H2+ dual-ion beam irradiation

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Cited by 26 publications
(16 citation statements)
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“…Hot-pressed SiC of Ϸ98.5% purity and 3.2 g/cm 3 density was supplied in sheets of Ϸ350 m by Elektroschmelzwerk Kempten. X-ray analysis gave 80% 6H-SiC, 18% 4H-SiC, and Ϸ2% free carbon, while transmission electron microscopy ͑TEM͒ in addition revealed small amounts of 3C-SiC ͑␤-SiC͒ and 15R-SiC.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Hot-pressed SiC of Ϸ98.5% purity and 3.2 g/cm 3 density was supplied in sheets of Ϸ350 m by Elektroschmelzwerk Kempten. X-ray analysis gave 80% 6H-SiC, 18% 4H-SiC, and Ϸ2% free carbon, while transmission electron microscopy ͑TEM͒ in addition revealed small amounts of 3C-SiC ͑␤-SiC͒ and 15R-SiC.…”
Section: Methodsmentioning
confidence: 99%
“…In the latter case helium is produced by nuclear transmutations while in semiconductors introduction of helium is proposed for gettering impurities. Previous investigations on helium-induced microstructural changes in SiC were confined to either shallow implantation of helium ions in the keV range [1][2][3] or neutron irradiation of boron-doped material. [4][5][6][7][8][9] In the present work, ␣ particles with energies from 0 to Ϸ25 MeV were implanted homogeneously up to depths of mostly Ϸ100 m. Therefore the results are not affected by surfaces ͑from shallow implantation͒ or grain boundaries ͑from boron segregation͒.…”
Section: Introductionmentioning
confidence: 99%
“…Hojou et al [90] found that formation of cavities in a-SiC at room temperature required a 15-keV H ion fluence of $5 Â 10 22 m À2 , which was about fifty times higher than the corresponding fluence for low energy He ion irradiation. Muto et al [75] reported relatively high fluences ($1-3 Â 10 22 m À2 ; $100 at.% implanted gas) for inducing visible cavity formation in SiC irradiated at room temperature with either low-energy (12-19 keV) H or He ions, with threshold H concentrations about double the corresponding threshold He concentrations.…”
Section: Threshold H Concentrations For Visible Cavity Formationmentioning
confidence: 99%
“…It also occurs in SiC (e.g. [219 -221]) with He bubble formation being enhanced by simultaneous H + implantation [222]. He bubbles/blisters are different to hydrogen blisters and require less fluence to form.…”
Section: S Agmentioning
confidence: 99%