2017
DOI: 10.1007/s10854-017-7178-x
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In situ investigation of magnetron sputtering plasma used for the deposition of multiferroic BiFeO3 thin films

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Cited by 5 publications
(2 citation statements)
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“…In general, the reports in the literature focus on preparing thin film materials requiring an deposited surfaces such as LaAlO3, glass and amorphous silica substrates under encompassing various precursors routs [37][38][39][40] . For examples, the chemical vapor deposition 41,42 , pulsed laser deposition 43,44 , sputtering 45,46 , sol-gel process 47,48 and the polymeric 49,50 methods were employ to grow BiFeO3thin films. As displayed in Fig.…”
Section: Two Dimensional Nanostructuresmentioning
confidence: 99%
“…In general, the reports in the literature focus on preparing thin film materials requiring an deposited surfaces such as LaAlO3, glass and amorphous silica substrates under encompassing various precursors routs [37][38][39][40] . For examples, the chemical vapor deposition 41,42 , pulsed laser deposition 43,44 , sputtering 45,46 , sol-gel process 47,48 and the polymeric 49,50 methods were employ to grow BiFeO3thin films. As displayed in Fig.…”
Section: Two Dimensional Nanostructuresmentioning
confidence: 99%
“…Many different deposition methods have been used to grow BFO thin films including pulsed laser deposition [9,10], chemical vapor deposition [11,12], sputtering [13,14] and chemical solution deposition using the sol-gel process [15,16] or the polymeric precursor method [17,18]. The chemical solution deposition (CSD) consists in the deposition of a solution on a substrate, typically by dip or spin coating, followed by subsequent annealing treatments of the wet film in order to crystallize the desired material [19].…”
Section: Introductionmentioning
confidence: 99%