1996
DOI: 10.1016/0168-583x(96)00075-4
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In situ EELS and TEM observation of silicon carbide irradiated with helium ions at low temperature and successively annealed

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Cited by 32 publications
(11 citation statements)
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“…2a shows the TEM image of SiC after 140 keV He ion irradiation and annealing at 1200 K for 30 min. The annealing temperate was selected to be high enough to induce crystallization (>1173 K), but low enough to minimize He release from the surface [16]. In a manner similar to threshold DPA for amorphization, there is a wide range of crystallization temperatures reported in literature, with complexity caused by detailed ion irradiation parameters [5,3,6,7].…”
Section: Methodsmentioning
confidence: 99%
“…2a shows the TEM image of SiC after 140 keV He ion irradiation and annealing at 1200 K for 30 min. The annealing temperate was selected to be high enough to induce crystallization (>1173 K), but low enough to minimize He release from the surface [16]. In a manner similar to threshold DPA for amorphization, there is a wide range of crystallization temperatures reported in literature, with complexity caused by detailed ion irradiation parameters [5,3,6,7].…”
Section: Methodsmentioning
confidence: 99%
“…The observation of the defects was carried out by using a transmission electron microscopy (TEM), JEOL JEM2000F, operating at 200 kV. The TEM is equipped with a low energy ion source, which enables us an in situ observation of the radiation effects [4]. Gaseous ions up to 35 kV are available to irradiate onto the TEM specimens at elevated temperatures.…”
Section: Methodsmentioning
confidence: 99%
“…Coupled to a 40 kV Origin Electric Company Ltd. ion accelerator, the ion beam made an angle of 30°w ith the electron beam and could be measured at the sample position using a Faraday cup integrated into a specimen rod. As with the previous JEOL JEM-100C, this instrument was also fitted with EELS [40]. JAERI became a part of the Japan Atomic Energy Agency (JAEA) in 2005.…”
Section: Japanmentioning
confidence: 99%
“…This was a 200 kV JEOL JEM-2000FX connected to a 10-400 kV ion source with an angle of 30° [56] between the electron and ion beams. Another facility was constructed at JAERI utilising a 200 kV JEOL JEM-2000F in 1996 [40,69,70]. Coupled to a 40 kV Origin Electric Company Ltd. ion accelerator, the ion beam made an angle of 30°w ith the electron beam and could be measured at the sample position using a Faraday cup integrated into a specimen rod.…”
Section: Japanmentioning
confidence: 99%
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