In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Li, Yan; Zhang, Hang; Yang, Ruyi; Tazrin, Fahima; Zhu, Chenxu; Kaddoura, Moufeed; Blondeel, Eric J. M.; Cui, Bo

doi:10.1016/j.sna.2019.04.008

Cited by 30 publications

(31 citation statements)

References 46 publications

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“…The inorganic materials used to fabricate MNs are silicon, 62,63,70,114 glass, 115–117 and ceramic. 74,75 Until now, the inorganic materials have been used as structural materials to fabricate solid MNs, coated MNs, and hollow MNs.…”

Section: Classification Of Mnsmentioning

confidence: 99%

“…1,2,8,113 Until now, only some literatures have been reported related to the in-plane MNs to deliver drugs, as shown in Table 1. For examples, Li et al 70 fabricated the in-plane silicon MNs with conical structure, tapering smoothly from the base to the apex by micromachining method. The surface of the MNs was treated with oxygen plasma to make the surface hydrophilic.…”

Section: Classification Of Mnsmentioning

confidence: 99%

“…74,75 Until now, the inorganic materials have been used as structural materials to fabricate solid MNs, coated MNs, and hollow MNs. 39,61,63 –65,70,75,76,118 Hereinto, silicon is the most common inorganic materials for manufacturing various MNs. The silicon is relative high hardness; therefore, the silicon MNs are easily to be penetrated into skin.…”

Section: Classification Of Mnsmentioning

confidence: 99%

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Microneedle System for Transdermal Drug and Vaccine Delivery: Devices, Safety, and Prospects

Sun

Zhuang

et al. 2019

Dose-Response

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Microneedle (MN) delivery system has been greatly developed to deliver drugs into the skin painlessly, noninvasively, and safety. In the past several decades, various types of MNs have been developed by the newer producing techniques. Briefly, as for the morphologically, MNs can be classified into solid, coated, dissolved, and hollow MN, based on the transdermal drug delivery methods of “poke and patch,” “coat and poke,” “poke and release,” and “poke and flow,” respectively. Microneedles also have other characteristics based on the materials and structures. In addition, various manufacturing techniques have been well-developed based on the materials. In this review, the materials, structures, morphologies, and fabricating methods of MNs are summarized. A separate part of the review is used to illustrate the application of MNs to deliver vaccine, insulin, lidocaine, aspirin, and other drugs. Finally, the review ends up with a perspective on the challenges in research and development of MNs, envisioning the future development of MNs as the next generation of drug delivery system.

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Section: Classification Of Mnsmentioning

confidence: 99%

Section: Classification Of Mnsmentioning

confidence: 99%

Section: Classification Of Mnsmentioning

confidence: 99%

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Microneedle System for Transdermal Drug and Vaccine Delivery: Devices, Safety, and Prospects

Sun

Zhuang

et al. 2019

Dose-Response

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“…The design and fabrication of MNs determine their specic bioassay features. Many strategies (e.g., etching, 22,23 lithography, [24][25][26] micromachining, [27][28][29] and threedimensional (3D) printing [30][31][32] ) have been used for these purposes. Etching is one of the traditional methods to directly fabricate MNs through chemical reagents or physical ions, and is especially used to produce metal-based MNs.…”

Section: Design and Fabrication Strategies Of Mnsmentioning

confidence: 99%

Microneedle-based bioassays

et al. 2020

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“…Miniaturised components can be manufactured by (i) electro-discharge machining [7][8][9][10], (ii) laser micromanufacturing [11][12][13], (iii) lithography, electroplating and moulding (LIGA) [14,15], (iv) deep reactive ion etching [16,17], (v) deep UV lithography [18,19] or (vi) mechanical micromachining [20][21][22][23][24] technologies. Excellently precise geometrical features and small tolerances can be achieved by these micromachining technologies; however, their operation time and cost are often extremely high.…”

Section: Introductionmentioning

confidence: 99%

A review on micro-milling: recent advances and future trends

Balázs

Geier

Takács

et al. 2020

Int J Adv Manuf Technol

124

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Recently, mechanical micro-milling is one of the most promising micro-manufacturing processes for productive and accurate complex-feature generation in various materials including metals, ceramics, polymers and composites. The micro-milling technology is widely adapted already in many high-tech industrial sectors; however, its reliability and predictability require further developments. In this paper, micro-milling related recent results and developments are reviewed and discussed including micro-chip removal and micro-burr formation mechanisms, cutting forces, cutting temperature, vibrations, surface roughness, cutting fluids, workpiece materials, process monitoring, micro-tools and coatings, and process-modelling. Finally, possible future trends and research directions are highlighted in the micro-milling and micro-machining areas.

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In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening

Cited by 30 publications

References 46 publications

Microneedle System for Transdermal Drug and Vaccine Delivery: Devices, Safety, and Prospects

Microneedle System for Transdermal Drug and Vaccine Delivery: Devices, Safety, and Prospects

Microneedle-based bioassays

A review on micro-milling: recent advances and future trends

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