In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

Ken, Sawada; Plas, G. Van der; Mori, Shigeo; Cherman, Vladimir; Mercha, A.; Verkest, D.; Fukuzaki, Yuzo; Ammo, H.

doi:10.1109/icmts.2015.7106126

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Introduction2

B Start-stop Pulse Controller1

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2016

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(3 citation statements)

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“…Ken Sawada et al proposed a start-stop self-pulsing circuit [5]. A schematic of the CBCM start-stop controller is shown in Fig.…”

Section: B Start-stop Pulse Controllermentioning

confidence: 99%

“…Fig. l. It consists of three main parts. First is the "flexible" RO, second is the start-stop pulse control part [5], and third is the "versatile" test functional parts placed in parallel. Test parts, for example, are CBCM circuits, Devices Under Test (DUTs) of CP and PID-CBCM circuits [6].…”

Section: Introductionmentioning

confidence: 99%

“…A pulse from a tunable RO can be shared with all of test parts. A fixed number of pulses are controlled to start and stop by an external triggered low frequency signal [5]. A measurement technique of each test part is devised for this comprehensive test circuit.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

Mori¹,

Ken²,

Tomita³

et al. 2016

2016 International Conference on Microelectronic Test Structures (ICMTS)

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A highly effective and versatile test structure with a flexible pulse generating circuit is proposed. Several significant features of the key components are demonstrated, that is, the tunable ring oscillator, the start-stop pulse controller, the Charge Injection induced Error Free Charge Based Capacitance Measurement (CIEF-CBCM) using Self-Aligned pulses and the modified Charge Pumping (CP) technique. This circuit system enables efficiently to collect data of multiple dielectric properties.

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“…Ken Sawada et al proposed a start-stop self-pulsing circuit [5]. A schematic of the CBCM start-stop controller is shown in Fig.…”

Section: B Start-stop Pulse Controllermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

Mori¹,

Ken²,

Tomita³

et al. 2016

2016 International Conference on Microelectronic Test Structures (ICMTS)

Self Cite

View full text Add to dashboard Cite

show abstract

In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

Cited by 1 publication

References 3 publications

Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

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