In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer

Przybyla, Richard J.; Shelton, Stefon; Guedes, A.; Izyumin, Igor; Kline, Mitchell; Horsley, David A.; Boser, Bernhard E.

doi:10.1109/jsen.2011.2157490

Cited by 166 publications

(90 citation statements)

References 15 publications

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“…These sensors might be discrete or might be integrated with other sensors for multi-component orthogonal sensing in environments that change quickly and contain a number of chemical or biological species. [306,307] A second aspect of this technology is electronics [308] -wireless data communication and power sources [306,[309][310][311][312][313][314][315] that can be co-located with the sensors.…”

Section: Extreme-environment Sensors/electronicsmentioning

confidence: 99%

Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges

Tsao

Chowdhury

Hollis

et al. 2017

Adv Elect Materials

965

463

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Section: Extreme-environment Sensors/electronicsmentioning

confidence: 99%

Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges

Tsao

Chowdhury

Hollis

et al. 2017

Adv Elect Materials

965

463

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“…The prototyped pMUT showed a non-linearity above about 0.3 V p . This non-linearity was probably caused by the stiffening effect of the stiffening diaphragm [37]. As seen in this graph, the measured displacement of the measured result was two thirds of the simulated result in the linear region.…”

Section: Resultsmentioning

confidence: 87%

Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

2018

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This paper presents a fibered-epitaxial lead zirconate titanate (PZT) thin film with intermediate features between the monocrystalline and polycrystalline thin films for piezoelectric micromachined ultrasound transducer (pMUT). The grain boundaries confirmed by scanning electron microscopy, but it still maintained the in-plane epitaxial relationship found by X-ray diffraction analyses. The dielectric constant (εr33 = 500) was relatively high compared to those of the monocrystalline thin films, but was lower than those of conventional polycrystalline thin films near the morphotropic phase boundary composition. The fundamental characterizations were evaluated through the operation tests of the prototyped pMUT with the fibered-epitaxial thin film. As a result, its piezoelectric coefficient without poling treatment was estimated to be e31,f = −10–−11 C/m2, and thus reasonably high compared to polycrystalline thin films. An appropriate poling treatment increased e31,f and decreased εr33. In addition, this unique film was demonstrated to be mechanically tougher than the monocrystalline thin film. It has the potential ability to become a well-balanced piezoelectric film with both high signal-to-noise ratio and mechanical toughness for pMUT.

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“…Micromachined Ultrasonic Transducers (MUTs), such as those actuated by capacitive layers (CMUTs) or by piezoelectric layers (PMUTs), are an emerging technology with relevance to a diversity of applications. For example, MUT arrays have been designed for the purposes of rangefinding [8], sound projection [9], and fingerprint identification [10]. In the field of medical sonography, MUT arrays are particularly attractive due to their greater layout flexibility and their low mechanical impedance, the latter of which obviates the need for complicated impedance matching layers.…”

Section: Introductionmentioning

confidence: 99%

Efficient Broadband Simulation of Fluid-Structure Coupling for Membrane-Type Acoustic Transducer Arrays Using the Multilevel Fast Multipole Algorithm

Shieh

Sabra

Degertekin

2016

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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A boundary element model provides great flexibility for the simulation of membrane-type micromachined ultrasonic transducers (MUTs) in terms of membrane shape, actuating mechanism, and array layout. Acoustic crosstalk is accounted for through a mutual impedance matrix which captures the primary crosstalk mechanism of dispersive-guided modes generated at the fluid-solid interface. However, finding the solution to the fully-populated boundary element matrix equation using standard techniques requires computation time and memory usage which scales by the cube and by the square of the number of nodes, respectively, limiting simulation to a small number of membranes. We implement a solver with improved speed and efficiency through the application of a multi-level fast multipole algorithm (FMA). By approximating the fields of collections of nodes using multipole expansions of the free-space Green’s function, an FMA solver can enable the simulation of hundreds of thousands of nodes while incurring an approximation error that is controllable. Convergence is drastically improved using a problem-specific block-diagonal preconditioner. We demonstrate the solver’s capabilities by simulating a 32-element 7 MHz 1-D CMUT phased array with 2880 membranes. The array is simulated using 233,280 nodes for a very wide frequency band up to 50 MHz. For a simulation with 15,210 nodes, the FMA solver performed 10-times faster and used 32-times less memory than a standard solver based on LU decomposition We investigate the effects of mesh density and phasing on the predicted array response and find that it is necessary to use about 7 nodes over the width of the membrane to observe convergence of the solution–even below the first membrane resonance frequency–due to the influence of higher-order membrane modes.

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In-Air Rangefinding With an AlN Piezoelectric Micromachined Ultrasound Transducer

Cited by 166 publications

References 15 publications

Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges

Ultrawide‐Bandgap Semiconductors: Research Opportunities and Challenges

Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer

Efficient Broadband Simulation of Fluid-Structure Coupling for Membrane-Type Acoustic Transducer Arrays Using the Multilevel Fast Multipole Algorithm

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