Improving the linearity of the Michelson interferometric angular measurement by a parameter compensation method

Abstract

A parameter compensation method is developed to improve the linearity of the Michelson interferometric angular measurement. The formulas for the exact calculation of the parameters are presented; different cases are discussed. By introducing a weight function in the calculation, we can change the distribution of the linearity over the whole range of measurement. The theoretical analysis and the experimental results show that this method greatly improves the linearity of the measurement even for a large range of measurement.

Wide-range two-dimensional small rotation-angle measurement by use of fringe projection

“…The maximum measurable ranges of the angular displacement are calculated as 87.6 arcsec for both directions from Eqs. (8) and (10), respectively. Figure 7 shows the measurement results in the range of 0 to 80 arcsec for the x-direction.…”

“…Although these systems are able to realize high accurate and wide-range rotation-angle measurement, they become complicated and large. The other techniques that simplify and miniaturize the interferometer have been proposed [6][7][8][9][10][11][12] . In those systems, one or both arms contain prisms in the interferometer.…”

Large angular range carousel interferometer for spectroscopic applications

“…Angle measurement techniques are important in optical interferometry, optical processing, metrology and spectroscopy [1][2][3][4][5][6][7][8][9][10][11]. In these techniques optical path difference (OPD) at the output port is created using assembly of rotating mirrors which is inherently a nonlinear function of rotation.…”

Fiber-optic angle sensor based on an extrinsic Fabry–Perot cavity

“…For example, a capacitive angle sensor with infinite range but low resolution has been reported [2]. Optical measurement of small angles is conventionally performed with interferometers [3] and autocollimators [4] or surface plasmon resonance sensors [5]. They have been widely used in alignment, machine-tool calibration, and many other applications.…”