2015
DOI: 10.1002/sca.21246
|View full text |Cite
|
Sign up to set email alerts
|

Improving dimensional measurement from noisy atomic force microscopy images by non‐local means filtering

Abstract: Quantitative evaluation of dimensional parameters from noisy atomic force microscopy (AFM) images was investigated. Non-local means (NLM) denoising was adopted to reduce noise and maintain fine image structures. Major tuning parameters in NLM filtering, such as the patch size and the window size, were optimized on simulated surface structures. The ability of dimensional evaluation from noisy data was demonstrated to be improved by almost 15 times. Finally, NLM filtering with optimal settings was applied on exp… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2019
2019
2022
2022

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(2 citation statements)
references
References 24 publications
(31 reference statements)
0
2
0
Order By: Relevance
“…Algorithms for double tip identification and correction in AFM data were tested using synthetic data with deposited particles of different coverage factors [ 24 ]. Simple patterns combined with Gaussian roughness were used for development of non-local means denoising for more accurate dimensional measurements [ 25 ]. Combined with real measurements, synthetic data were used to establish methodology for spectral properties evaluation on rough surfaces [ 26 ] and spectral properties determination from irregular regions [ 27 ].…”
Section: Introductionmentioning
confidence: 99%
“…Algorithms for double tip identification and correction in AFM data were tested using synthetic data with deposited particles of different coverage factors [ 24 ]. Simple patterns combined with Gaussian roughness were used for development of non-local means denoising for more accurate dimensional measurements [ 25 ]. Combined with real measurements, synthetic data were used to establish methodology for spectral properties evaluation on rough surfaces [ 26 ] and spectral properties determination from irregular regions [ 27 ].…”
Section: Introductionmentioning
confidence: 99%
“…There is no method that can filter out all types of noise at the same time. Therefore, different filtering methods, according to the type of the noise, need to be applied to acquire high-quality images with removed noise [34]. Chen [5] has proposed “unsupervised destripe” to remove the non-uniform stripe noises from AFM images.…”
Section: Introductionmentioning
confidence: 99%