Abstract:This study coated CrN films onto oxynitriding-treated Vanadis 23 high-speed steel using the DC magnetron sputtering process of the PVD technique. The experimental parameters include various deposition temperatures (275, 300, 325, and 350°C), a bias of -25 V, a power of 100 W, a gas flow rate of 45/30 (Ar/N2) sccm, and a deposition time of 2.5 h. The research results show that when the coatings were deposited at 325°C, the CrN coatings possessed an obvious columnar crystal structure, the highest hardness (13.4 … Show more
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