Improvement of resistance characteristics of NiCr thin film by gradational double annealing process

Kim, Nam–Hoon; Kwon, Yong Hun; Park, J.; Choi, Gwang-Pyo

doi:10.1049/el:20052343

Cited by 3 publications

(1 citation statement)

References 3 publications

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“…Recently, many researches on microsensor have been actively conducted to low power consumption, small size, lightweight, and high-speed response using semiconductor process technologies [1,2]. Micro-heater is employed for exact control of operation temperature and low thermal capacity in fabrication of microsensor and micro-actuators [1,3,4]. Platinum is the most candidates as the micro-heater material due to its long-term stability, reproducibility and chemical stability at high temperature [5].…”

Section: Introductionmentioning

confidence: 99%

Electrical and Thermal Properties of Platinum Thin Films Prepared by DC Magnetron Sputtering for Micro-Heater of Microsensor Applications after CMP Process

Kim

et al. 2007

SSP

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Chemical mechanical polishing (CMP) of platinum thin films was performed for the improvement of surface morphology. Platinum thin films after CMP process with alumina slurry showed the increase of surface morphology without a remarkable difference of the thermal characteristics of as-annealed platinum thin films. The power consumption of platinum thin films micro-heater also became very low by improvement of surface morphology after CMP process. The similar or improved electrical and thermal characteristics of platinum thin films for micro-heater of sensor applications as well as evaluation possibility of sensing property by the improved surface morphology were obtained after CMP process.

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