Abstract:Wave plates with subwavelength structures are fabricated by applying semiconductor processes to realize a high-aspect-ratio grating structure with a small linewidth and a large grating step. We have fabricated wave plates with a large phase retardation using a titanium dioxide (TiO 2 ) film. However, the plates have a problem in that a slight deviation in grating step will bring about a large difference in phase retardation because TiO 2 has a large refractive index. To solve this problem, heat treatment of th… Show more
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