Improved visible transparency of SIO2/ZNO:AL /CEO2-TIO2/SIO2 multilayer films with high UV absorption and infrared reflection rate

Abstract

New visible transparent, UV absorption, and high infrared reflection properties have been realized by depositing multilayer SiO 2 /ZnO: Al/CeO 2 -TiO 2 /SiO 2 films onto glass substrates at low temperature by radio frequency magnetron sputtering. Optimum thickness of SiO 2 , ZnO: Al (ZAO) and CeO 2 -TiO 2 (CTO) films were designed with the aid of thin film design software. The degree of antireflection can be controlled by adjusting the thickness and refractive index. The outer SiO 2 film can diminish the interference coloring and increase the transparency; the inner SiO 2 film improves the adhesion of the coating on the glass substrate and prevents Ca 2+ , Na + in the glass substrate from entering the ZAO film. The average transmittance in the visible light range increases by nearly 18%-20%, as compared to double layer ZAO/CTO films. And the films display high infrared reflection rate of above 75% in the wavelength range of 10-25 μm and good UV absorption (> 98%) properties. These systems are easy to produce on a large scale at low cost and exhibit high mechanical and chemical durability. The triple functional films with high UV absorption, antireflective and high infrared reflection rate will adapt to application in flat panel display and architectural coating glass, automotive glass, with diminishing light pollution as well as decreasing eye fatigue and increasing comfort.