Laser ablation of a solid target has wide applications in both science and technology. 1 In 1980s, we have witnessed the advent of the era of nanotechnology with the discovery of C 60 by laser ablation of a graphite target. 2 Besides, diverse metal and semiconductor clusters were produced by laser ablation in gas phase 3 and a variety of multi-element thin films with novel properties were realized by pulsed laser deposition (PLD). 1 In particular, laser ablation has been proved to be a powerful method to replace a typical conventional technique such as chemical vapor deposition (CVD) in the formation of metal or semiconductor nitride films. 4 When they were grown via CVD, nitride films usually showed severe nitrogen deficiency; in laser-produced plasma plume (plume, in short), nitrogen is rather easily activated, which is certainly beneficial for producing defect-free functional nitride films such as GaN, Si x N y , and TiN. Therefore, PLD has often been carried out in nitrogen atmosphere to promote reactive laser ablation to generate nitrides, which can work as precursors of nitride films. 5 In this regard, identification of chemical species in the plume is essential to establish an optimum condition to grow high-quality thin films. But detailed mass-spectral analysis of the products in the plume produced for PLD is quite rare because the typical pressure in PLD is in the range of 0.1 to 1 Torr, at which mass spectrometers are not applicable.In case of the Ti + N 2 reaction, the only result on polyatomic products comes from the study of Kushto et al.,6 who employed the matrix isolation method for the identification of TiN 2 by analyzing the infrared absorption spectra. Here, we present experimental results on the analysis of the chemical species in the plume produced by laser ablation of a Ti target in nitrogen jet by mass spectrometry. To our knowledge, this is the first direct observation of TiN 2 + . Previously, Castleman, Jr. and coworkers reported large (TiN) n + clusters generated in a laser induced plasma reactor source by time-of-flight mass spectrometry. 7 The experimental setup is depicted in Figure 1. Briefly, the experimental apparatus consists of two differentially pumped chambers: a reaction chamber and an analysis chamber. In the reaction chamber, a Ti target (20 mm in diameter, 6 mm thick) was mounted on a target holder and the target was rotated during the experiment to reduce target aging effect. A pulsed Nd:YAG (Continuum Surelite I, 1064 nm) laser operating at 10 Hz was focused onto the target surface using a lens with focal length of 25 cm to generate a plume. The laser fluence was 0.25 J/cm 2 and the spot size of the focused laser beam was 1.1 mm 2 . Synchronized with the laser pulse, a pulsed nitrogen jet with duration of 190 s was blown to the target to produce metal nitride ions in the plume via reactive laser ablation. With pulsed valve on, the pressures in the source and analysis chamber were maintained at 4.0 × 10 4 and 2.0 × 10 6 Torr, respectively. In the analysis chamber, a quad...