Abstract:The microelectronic industry requires more and more low consumption and high reliability solutions. In this scenario the silicon nanocrystal memories (Si-nc) are one of the most mature technologies able to replace the Flash floating gate in NOR embedded applications. The main advantages of Si-nc memories are: the full compatibility with the CMOS process using a reduced number of masks (1) and the robustness against SILC (2). In this paper we present an experimental work on the optimized silicon nanocrystal cel… Show more
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