1997
DOI: 10.1063/1.118900
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Improved performance of laterally oxidized GaInP/AlGaInP lasers by thermal annealing

Abstract: The improvement of efficiency and threshold of visible AlGaInP/GaInP laser diodes, which use buried AlAs native oxides for carrier and optical confinement, is described. Annealing of completed laser bars in an inert atmosphere lowers the threshold current and dramatically increases the external differential quantum efficiency. The characteristic temperature of the devices also increases from 74.8 to 125 K, indicating that the electron confinement is greatly enhanced in the annealed lasers, resulting in the obs… Show more

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Cited by 6 publications
(4 citation statements)
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References 12 publications
(8 reference statements)
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“…The considerable improvement in PL intensity and reduction in FWHM with the enhancement in the threshold current I th can be related to the reduction in deep-level traps and oxygen-related defects due to the elevated temperature as explained in Ref. 9. However, the improvement we are getting in this work is higher than reported.…”
Section: Wavelength (Nm)contrasting
confidence: 56%
See 1 more Smart Citation
“…The considerable improvement in PL intensity and reduction in FWHM with the enhancement in the threshold current I th can be related to the reduction in deep-level traps and oxygen-related defects due to the elevated temperature as explained in Ref. 9. However, the improvement we are getting in this work is higher than reported.…”
Section: Wavelength (Nm)contrasting
confidence: 56%
“…Floyd et al performed annealing after capping the top surface by SiO 2 film deposited using plasmaenhanced chemical vapor deposition, and limited the annealing temperature to 400°C, and obtained an improvement in threshold current I th , from 20 to 18 mA. 9 A similar procedure was performed; the annealing temperature was set to 450°C for 30 min. Improvement in the threshold current was observed for ridge lasers from 33 to 25 mA.…”
Section: Introductionmentioning
confidence: 99%
“…The third process is the reduction of deep-level traps. The improvement in PL intensity and reduction in FWHM, in conjunction with the enhancement in threshold current Ith can be related to the reduction in deeplevel traps or oxygen-related DX centers [22].…”
Section: Discussionmentioning
confidence: 99%
“…The wet oxidation process induces the formation of interface oxide traps, whose trap density has been investigated by a capacitance technique [9] . Post-oxidation annealing in a nitrogen environment at high temperatures can reduce the interface trap density and improve the characteristics of the device [10] . This kind of post-oxidation annealing can benefit oxide-defined VCSEL fabrication to improve the lasing performances.…”
mentioning
confidence: 99%