2019
DOI: 10.1088/0256-307x/36/5/054204
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Improved Performance of a Wavelength-Tunable Arrayed Waveguide Grating in Silicon on Insulator*

Abstract: The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication process on the AWG is achieved by the design of bi-level tapers. The wavelength tuning of the AWG is achieved according to the thermo-optic effect of silicon, and uniform heating of the silicon waveguide layer is achieved by optimizing the heater design. The fabricated AWG shows a minimum crosstalk of … Show more

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Cited by 5 publications
(1 citation statement)
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“…SOI is a state-of-the-art material for photonic incorporated chip materials in the era of nanotechnology. Compared with the current material frameworks, such as indium phosphide (InP) [16], SiO 2 [17,18], and polymers [19] which can be utilized to manufacture AWG, the SOI-based platform enables low power consumption, small size, and high computing speed AWG [20][21][22][23]. Its fabrication process is compatible with the complementary metal oxide semiconductor, which can simplify the process and lessen the expense.…”
Section: Introductionmentioning
confidence: 99%
“…SOI is a state-of-the-art material for photonic incorporated chip materials in the era of nanotechnology. Compared with the current material frameworks, such as indium phosphide (InP) [16], SiO 2 [17,18], and polymers [19] which can be utilized to manufacture AWG, the SOI-based platform enables low power consumption, small size, and high computing speed AWG [20][21][22][23]. Its fabrication process is compatible with the complementary metal oxide semiconductor, which can simplify the process and lessen the expense.…”
Section: Introductionmentioning
confidence: 99%