Important sputtering yield data for tokamaks: A comparison of measurements and estimates

Bohdansky, J.

doi:10.1016/0022-3115(80)90302-5

Cited by 59 publications

(16 citation statements)

References 64 publications

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“…This would tend to be too high a value for elements lighter than Al. 46 We shall not work with Eqns (20) and (21) any further but simply note that this simple approach is useful but less precise than the approaches of Matsunami et al 3 and Yamamura and Tawara. 4 In the fits of the data 7,8,24 -26 for 28 elements as listed above, the difference between the curves for Matsunami Figure 2.…”

Section: Fitting To Published Experimental Datamentioning

confidence: 96%

“…Because the fitting of the data depends on the function used for S n E and the data selected, there is inevitably some variation between˛Ł and E th that may be anti-correlated. Bohdansky 19,20 expresses the threshold effects with rather more complex terms than in Eqn. (8) but focuses on the energy regime below 600 eV to study the effects of light ion sputtering in the tokamak where the plasma strikes the containment wall.…”

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confidence: 99%

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An accurate semi‐empirical equation for sputtering yields I: for argon ions

Seah¹,

Clifford²,

Green³

et al. 2005

Surface & Interface Analysis

117

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An analysis has been made of the historical data for argon ion sputtering yields of 28 mono-elemental solids in the energy range 250-10 000 eV to develop an improved semi-empirical formula based on Matsunami et al.'s and Yamamura and Tawara's formulations. The best result is found if an essential component involving the target density is included in Matsunami et al.'s approach. The scatter between the predictions and the experimental data is reduced to 9.0% by generating an analytical expression for the term Q that requires none of the target-specific numbers from special look-up tables of the type used by Matsunami et al. and Yamamura and Tawara. For elements other than the 34 elements for which Q values are tabulated, the new Q values range up to a factor of 5 from the default value that they recommend.The predictions are tested by a new method for determining sputtering yields using atomic force microscopy to measure very small crater volumes sputtered in ultrahigh vacuum. Here, 26 mono-elemental targets were studied using a 5 keV argon ion beam set at 45• to the surface normal. The effect of the angle of incidence is evaluated best using Yamamura et al.'s angular equations for this contribution. Results for Sb, Te and Bi indicate a significantly higher sputtering yield than expected. This is thought to arise from the high content of polyatomic groups associated with the low sublimation energies for such clusters in the pure elements of groups V-B and VI-B of the Periodic

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Section: Fitting To Published Experimental Datamentioning

confidence: 96%

mentioning

confidence: 99%

An accurate semi‐empirical equation for sputtering yields I: for argon ions

Seah¹,

Clifford²,

Green³

et al. 2005

Surface & Interface Analysis

117

View full text Add to dashboard Cite

show abstract

Section: Sputteringmentioning

confidence: 99%

“…For a given projectile and target, there exists a minimum projectile kinetic energy needed to induce sputtering. This energy is called the threshold energy (E th ), and is given by (Bohdansky et al, 1980;Anderson & Bay, 1981) )where M 1 is the projectile mass, M 2 is the mean molecular mass per atom of the target, and β, the maximum fractional energy transfer possible in a head-on elastic collision, is given by 2 2 1 2 1 ) (…”

Section: Sputteringmentioning

confidence: 99%