The energy level alignment at interfaces between conjugated organic semiconductors and metals is recognized as a key factor determining the performance of organic-based (opto)-electronic devices. [1,2] Experimentally, the hole-injection barriers (HIBs) at organic/metal interfaces can be directly determined by using ultraviolet photoelectron spectroscopy (UPS).In addition, angle-resolved UPS (ARUPS) allows molecular orientations at surfaces to be assessed. In the work reported here, we used this method to investigate interfaces between two prototypical organic semiconductors, pentacene (PEN) and perfluoropentacene (PFP), and Au. PEN can be used as the active material in organic field-effect transistors (OFETs) with a high hole mobility of up to 5.5 cm 2 V -1 s -1 .[3] The fabrication of integrated circuits also requires high-electron-mobility OFETs; this is difficult to achieve with PEN, which has reported electron mobilities of up to 0.04 cm 2 V -1 s -1 .[4] One approach to improving n-type performance of OFETs is to use PFP, resulting in high electron mobilities of more than 0.2 cm 2 V -1 s -1 . [5] Commonly, Au is used as the source and drain contact metal in OFETs. Therefore, the interface energetics between organic semiconductors and Au are of interest, since charges have to be transported across these interfaces and minimized contact resistance is aimed at. While a number of reports are already available on PEN/Au interfaces, nothing is yet known about PFP/Au. Moreover, published work on PEN/Au interfaces reveals controversial values for the HIB, ranging from ca. 0.5 to 0.9 eV for various polycrystalline [6][7][8][9] and single-crystal [10,11] Au surfaces. Even larger differences of the HIB were found for PEN on pristine and molecularly modified Au [9] and Ag [12] surfaces. At present, molecular-layer thickness and orientation, polarization, and thin-film polymorphism-and combinations thereof, as these parameters are interdependent-are being discussed as possible reasons for the observed variation. [8,9,12] The molecular-charge reorganization energy is yet another important parameter for efficient transport of charge carriers across interfaces and can also be assessed with UPS. [13][14][15] The present comparative ARUPS study for PEN and PFP on Au(111) highlights with unprecedented accuracy i) the effect of perfluorination (of PEN) on the interface energy levels, and ii) the effect of molecular-layer thickness on organic semiconductor/metal interface energetics. In short, the HIB for a monolayer of each organic material on the metal was almost identical, despite the very different ionization energies of PEN and PFP. In addition, we found distinctly different molecular level energies as a function of layer thickness, attributed to different polarization energies. The photoemission spectra for monolayers of the two organic materials corroborated that the charge-reorganization energy of PEN/Au (111) is significantly larger than for PEN in the gas phase, and even larger for PFP/Au(111).First, we discuss the inte...