Implanted dopant and associated damage profiles in kiloelectronvolt 19F+ implanted LiNbO3

Tan, Chris K. K.; Xia, Yuxing; Liu, Xiangdong; Liu, Jitian; Ma, Shijie; Li, Jinhua

doi:10.1016/0168-583x(94)95343-0

Cited by 3 publications

(3 citation statements)

References 11 publications

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“…Fig.2 show the example of the impurity depth profile, which is restored by Pearson IV statistical distribution using the spatial moments calculated by RANGE code. The good agreement with experimental data [15] and with the corresponding Monte-Carlo simulation by means ofthe TRIRS code [16] is observed. The depth profile of energy deposition (due to elastic collisions in atomic displacements cascade) can also be restored by means ofPearson IV distribution using the spatial moments calculated by RANGE code.…”

Section: Resultssupporting

confidence: 66%

“…As an example, we can see in Fig.3 (a, b) the depth profiles of radiation damages (created by implantation ofLiNbO3 polyatomic target) both experimental and calculated. As seen from this picture the RANGE calculations are in good agreement both with the experimental data [15,17] and with MC calculations which are performed by TRIRS code [16]. squares -experimental data [12].…”

Section: Resultssupporting

confidence: 63%

“…Table 1. Calculated by RANGE (this work), PRAL [9] and measured [13,14] values ofprojected range, R., and relative range straggling, (L1RfR -experimental data [15].…”

Section: Resultsmentioning

confidence: 99%

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Transport equations calculation of energy deposition distribution in atomic collisions cascade

Журкин¹,

Ivanov²

1999

SPIE Proceedings

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The new software package RANGE for the calculation ofthe statistical parameters of range and deposited energy depth distributions in atomic collisions cascade caused in multicomponent media by ion bombardment is presented. Possible primary energies covers the range from 100 eV to 1000 MeV/a.m.u.. This code is based on the specially developed new numerical method of solving of the Linear Boltzmann Transport Equation. Unlike others similar approaches the presented method permit us to extend this approach to include directly the case of homogeneous compound targets without of the losses of calculation accuracy. It is possible to take into consideration any ion-target combination both for mono-and polyatomic homogeneous targets (such as gases, metals, semiconductors, chemical compounds, and many others) containing up to 10 of different kinds of the atoms. Also RANGE code make possible the selection of the models of elastic cross-section and electronic stopping power (including ZBL ones which being used in very known TRIM code). Testing of RANGE code have shown a good quantitative agreement of the calculation data on the ranges and damages depth profiles both with the many experimental ones and with the corresponding calculations in the frame of Monte-Carlo technique at same selection of the stopping and scattering models.

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Section: Resultssupporting

confidence: 66%