Transport equations calculation of energy deposition distribution in atomic collisions cascade

Abstract

The new software package RANGE for the calculation ofthe statistical parameters of range and deposited energy depth distributions in atomic collisions cascade caused in multicomponent media by ion bombardment is presented. Possible primary energies covers the range from 100 eV to 1000 MeV/a.m.u.. This code is based on the specially developed new numerical method of solving of the Linear Boltzmann Transport Equation. Unlike others similar approaches the presented method permit us to extend this approach to include directly the case of homogeneous compound targets without of the losses of calculation accuracy. It is possible to take into consideration any ion-target combination both for mono-and polyatomic homogeneous targets (such as gases, metals, semiconductors, chemical compounds, and many others) containing up to 10 of different kinds of the atoms. Also RANGE code make possible the selection of the models of elastic cross-section and electronic stopping power (including ZBL ones which being used in very known TRIM code). Testing of RANGE code have shown a good quantitative agreement of the calculation data on the ranges and damages depth profiles both with the many experimental ones and with the corresponding calculations in the frame of Monte-Carlo technique at same selection of the stopping and scattering models.