1999
DOI: 10.1109/22.809016
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Impedance loaded SAW sensors offer a wide range of measurement opportunities

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Cited by 34 publications
(19 citation statements)
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“…Here, the electrical energy is transformed into acoustic/mechanical energy. The latter is sent out by the IDT and propagates along the substrate, while the impedance is used as the sensor signal [ 29 , 30 , 31 , 32 , 33 , 34 ].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Here, the electrical energy is transformed into acoustic/mechanical energy. The latter is sent out by the IDT and propagates along the substrate, while the impedance is used as the sensor signal [ 29 , 30 , 31 , 32 , 33 , 34 ].…”
Section: Resultsmentioning
confidence: 99%
“…The latter is typically associated with high-Q resonators with reflectors defining a resonant cavity [ 28 ] where the resonance frequency is used as a measurement signal. Otherwise, also for sensing purposes, 1-port approaches have been designed with an SAW generating IDTs and metallic acoustic reflectors in a distinct distance as sensor elements [ 29 , 30 , 31 , 32 , 33 ], known as a 1-port SAW delay line (DL) [ 34 ]. Here, the IDT acts as an antenna and the change in the propagation characteristic of the reflected SAW is monitored.…”
Section: Introductionmentioning
confidence: 99%
“…The change in permittivity is detected by an interdigital capacitor structure. Capacitive sensors are used in a wide range of sensing applications, for example non-destructive testing (NDT), chemical sensing, bio-sensing [16], humidity and moisture sensing [17], monitoring of curing processes [18], wireless sensing [19] and surface acoustic waves (SAW) [20]. An overview of the most important concepts related to interdigital electrode sensors are available in references [16,[21][22][23][24][25][26].…”
Section: Theorymentioning
confidence: 99%
“…SAW sensors could also be grouped into one-port SAW sensors and two-port SAW sensors which are also called impedance-loaded SAW sensors. One-port SAW sensors are directly affected by the measurand, impedance-loaded SAW sensors are electrically loaded by a conventional sensor, as a result, indirectly affected by the measurand [24][25][26]. In the impedance-loaded SAW sensors, the SAW device is used as a transponder for device identification, while the measurand is sensed by an external sensor.…”
Section: Introductionmentioning
confidence: 99%