2004
DOI: 10.1360/03ye0521
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Impacts of hydrogen dilution on growth and optical properties of a-SiC:H films

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Cited by 3 publications
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“…Thin films made of SiC are widely used in solar cell, film transistors, LED, preservative anti-oxidation coat and so on [9][10][11][12] . Up to now many contributions have been reported about the effect of impurity and defects on properties of films [13][14][15] , but seldom are the researches on thermal radiation characteristics of SiC film.…”
mentioning
confidence: 99%
“…Thin films made of SiC are widely used in solar cell, film transistors, LED, preservative anti-oxidation coat and so on [9][10][11][12] . Up to now many contributions have been reported about the effect of impurity and defects on properties of films [13][14][15] , but seldom are the researches on thermal radiation characteristics of SiC film.…”
mentioning
confidence: 99%