Impact of phonon-boundary scattering and multilevel copper-dielectric interconnect system on self-heating of SOI transistors

Liu, W.; Asheghi, Mehdi

doi:10.1109/stherm.2005.1412186

Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.

DOI: 10.1109/stherm.2005.1412186

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Impact of phonon-boundary scattering and multilevel copper-dielectric interconnect system on self-heating of SOI transistors

W. Liu

Mehdi Asheghi

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Impact of phonon-boundary scattering and multilevel copper-dielectric interconnect system on self-heating of SOI transistors

Cited by 1 publication

References 12 publications

Thermal resistance reduction in power MOSFETs integrated in a 65nm SOI technology

Thermal resistance reduction in power MOSFETs integrated in a 65nm SOI technology

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