Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials

Alvankarian, Jafar; Majlis, Burhanuddin Yeop

doi:10.1007/s00542-016-2899-y

Cited by 3 publications

(2 citation statements)

References 10 publications

(19 reference statements)

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“…We fabricated 10 devices without damaging the PDMS mold, three of which have been tested and results are presented in this work. It is pertinent to mention that PDMS is permeable to oxygen [37], therefore, to counteract the effect of oxygen on the curing process of the Glassomer, a hardener is added to the mixture. The proportion of hardener to Glassomer is set at 1:100 (mg mg −1 ).…”

Section: Fabrication Processmentioning

confidence: 99%

Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding

Atwa,

Shakeel

2024

J. Micromech. Microeng.

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This work introduces a new method for manufacturing fused silica (FS)-based hemispherical resonators (HSRs) using a printable polymer glass mixture and replication molding. This process involves 3D printing to create the mold, followed by the casting of a photo-reactive pre-polymer glass mixture. This technique allows us to produce complex 3D geometries and offers faster production of resonators compared to other traditional methods. In this study, we manufactured three devices and successfully identified resonance modes with two (N = 2), three (N = 3) and four (N = 4) nodes/antinodes in all three HSRs, demonstrating the repeatability of our new manufacturing method. The highest quality factor of 482 k was achieved for the N = 3 resonance mode using the ring-down method. Some of the key advantages of our method include producing multiple devices efficiently with relatively good surface quality, making it a viable option for producing high-precision devices in the future. Our new fabrication technique results in a device surface roughness of ∼100 nm (measured over an area of 250 μm × 250 μm) and manufacturing yield of over 90%. Moreover, all the steps involved in this method can be completed outside of a specialized cleanroom environment.

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Section: Fabrication Processmentioning

confidence: 99%

Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding

Atwa,

Shakeel

2024

J. Micromech. Microeng.

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show abstract

“…For optimal casting results, the PDMS mold was first cleaned with isopropyl alcohol (IPA) before use and dried using a constant flow of nitrogen. Since the PDMS is an oxygen-permeable material [24], Glassomer™ hardener was added to the solution to prevent interference of oxygen with the polymerization of Glassomer™. We used a 1:100 (mg/mg) ratio of hardener to Glassomer™ for our process.…”

Section: Fabrication Processmentioning

confidence: 99%

Fabrication and Analysis of a Printable Fused-Silica Based Double Paddle Oscillators

Atwa¹,

McNeill²,

Shakeel³

2023

Preprint

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Fabrication and analysis of printable fused-silica based double paddle oscillators

Atwa,

McNeill,

Shakeel

2023

Sensors and Actuators A: Physical

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Impact of oxygen-permeable mold on fabrication of microchannels with ultraviolet curable materials

Cited by 3 publications

References 10 publications

Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding

Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding

Fabrication and Analysis of a Printable Fused-Silica Based Double Paddle Oscillators

Fabrication and analysis of printable fused-silica based double paddle oscillators

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