IEEE International Electron Devices Meeting 2003
DOI: 10.1109/iedm.2003.1269160
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Impact of actively body-bias controlled (ABC) SOI SRAM by using direct body contact technology for low-voltage application

Abstract: Actively Body-bias Controlled (ABC) SO1 SRAM that has a new cell structure including connections of the access and the driver transistor's bodies to the word line is proposed to realize low-voltage operation. We developed the direct body contact technology to apply forward biases to the bodies without area penalties and increases of parasitic gate capacitances by using the hybrid trench isolation [l] for the first time. Moreover, the standby current does not change because the body bias is not applied when the… Show more

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Cited by 16 publications
(11 citation statements)
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“…Once the via design rules have been relaxed like above, we can define the concept of a "routing via" when the via layer is used for routing in conjunction with the metal layer above (and optionally below) the via layer. A similar concept is used in high-density SRAM design under the name of "shared contacts" [4] in order to suggest the sharing of the same long contact to poly and diffusion, and was also proposed as a general method under the name "slotted vias" [10] in order to suggest the shape of the trenches (or "slots") for such elongated vias. In this paper we prefer the name "routing vias" in order to suggest the use of the via structure for actual routing of signals, not only for contacting between two metal layers.…”
Section: Routing Viasmentioning
confidence: 98%
“…Once the via design rules have been relaxed like above, we can define the concept of a "routing via" when the via layer is used for routing in conjunction with the metal layer above (and optionally below) the via layer. A similar concept is used in high-density SRAM design under the name of "shared contacts" [4] in order to suggest the sharing of the same long contact to poly and diffusion, and was also proposed as a general method under the name "slotted vias" [10] in order to suggest the shape of the trenches (or "slots") for such elongated vias. In this paper we prefer the name "routing vias" in order to suggest the use of the via structure for actual routing of signals, not only for contacting between two metal layers.…”
Section: Routing Viasmentioning
confidence: 98%
“…The Active Body-biasing Controlled (ABC)-SOI capacitor utilizing the PD-SOI process with the Hybrid Trench Isolation technology [11], [12] provides a strong capacitive coupling. The strength of capacitive coupling is dependent upon a transistor size and gate voltage.…”
Section: A Abc-soi Capacitormentioning
confidence: 99%
“…There have many techniques been proposed to speed up LSI performance and to lower power supply voltages ( [1]- [3].) But they are not enough stable against PVT (Process, Voltage and Temperature) variation.…”
Section: Introduction Soi Devices Have Several Advantages Comparedmentioning
confidence: 99%