2015
DOI: 10.1117/12.2076262
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Imec iSiPP25G silicon photonics: a robust CMOS-based photonics technology platform

Abstract: Silicon photonics has become in the past years an important technology adopted by a growing number of industrial players to develop their next generation optical transceivers. However most of the technology platforms established in CMOS fabrication lines are kept captive or open to only a restricted number of customers. In order to make silicon photonics accessible to a large number of players several initiatives exist around the world to develop open platforms. In this paper we will present imec's silicon pho… Show more

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Cited by 51 publications
(43 citation statements)
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“…1(b), we also report a SEM picture of a detail of the Graphene layer on top of the Si waveguide. The Si photonic waveguide was realized within the IMEC iSiPP25G silicon on insulator (SOI) platform [18]. The Si ridge waveguide is designed to support a single transverse electric (TE) in-plane polarized optical mode with a core cross-section of 480 nm x 220 nm and 60 nm slab.…”
Section: Fabrication and Theorymentioning
confidence: 99%
“…1(b), we also report a SEM picture of a detail of the Graphene layer on top of the Si waveguide. The Si photonic waveguide was realized within the IMEC iSiPP25G silicon on insulator (SOI) platform [18]. The Si ridge waveguide is designed to support a single transverse electric (TE) in-plane polarized optical mode with a core cross-section of 480 nm x 220 nm and 60 nm slab.…”
Section: Fabrication and Theorymentioning
confidence: 99%
“…The proposed MRR has radius R 10 μm and coupling regions with gap g 200 nm between the access bus and ring waveguides. The silicon photonic chip was fabricated on the IMEC iSiPP25G SOI platform [17]. Graphene was grown by means of chemical vapor deposition on copper foils [18], and then transferred onto the chip by the process described in Ref.…”
Section: Fabricationmentioning
confidence: 99%
“…2. Thermo-optic and carrier-depletion phase modulation in silicon photonics fabricated with standard doping processes [20].…”
Section: Silicon Photonic Phase Modulationmentioning
confidence: 99%