1999
DOI: 10.1063/1.125270
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Imaging of microwave permittivity, tunability, and damage recovery in (Ba, Sr)TiO3 thin films

Abstract: We describe the use of a near-field scanning microwave microscope to quantitatively image the dielectric permittivity and tunability of thin-film dielectric samples on a length scale of 1 µm. We demonstrate this technique with permittivity images and local hysteresis loops of a 370 nm thick Ba0.6Sr0.4TiO3 thin film at 7.2 GHz. We also observe the role of annealing in the recovery of dielectric tunability in a damaged region of the thin film. We can measure changes in relative permittivity ǫr as small as 2 at ǫ… Show more

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Cited by 85 publications
(74 citation statements)
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“…Similarly, studies of microwave dissipation and relaxation in magnetic or dielectric materials have received great attention recently, e.g., to resolve the coupling of spins and charges in magnetic superconductors like the borocarbides or rutheno-cuprates [6,7,8], or materials displaying colossal magneto-resistance [9], or to search for low-loss ferrite or ferroelectric materials for frequency-agile devices [10,11,12]. …”
Section: Theoretical Backgroundmentioning
confidence: 99%
“…Similarly, studies of microwave dissipation and relaxation in magnetic or dielectric materials have received great attention recently, e.g., to resolve the coupling of spins and charges in magnetic superconductors like the borocarbides or rutheno-cuprates [6,7,8], or materials displaying colossal magneto-resistance [9], or to search for low-loss ferrite or ferroelectric materials for frequency-agile devices [10,11,12]. …”
Section: Theoretical Backgroundmentioning
confidence: 99%
“…17 Basic details of the microscope system used in the present work were described elsewhere. 18,19 Here we summarize the additional features of the broadband microscope.…”
Section: Methodsmentioning
confidence: 99%
“…The first embodiment of this concept was conceived for measuring the moisture content of paper [40]. Other embodiments use coaxial transmission lines with the sample in contact with the open end [41,42,43,44,45,46,47,48,49,50,51,52,53,54,55,56], or with an air gap between the probe and the sample [43,44,45,46,47,48,49,50,51,52,53,54,55]. A related far-field technique has been used to image surface resistance and nonlinearity with a scanned dielectric resonator in contact with the sample [8].…”
Section: An Overview Of Microwave Microscopy Techniquesmentioning
confidence: 99%
“…To avoid the issue of topographic features corrupting the dielectric imaging, we have developed a contact-mode version of dielectric imaging [48]. We use the near-field scanning microwave microscope with a sharp protruding center conductor.…”
Section: Linear Dielectric Response -Contact Modementioning
confidence: 99%
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