Imaging in Nanoscale Using Laser-Plasma Sources of Extreme Ultraviolet (EUV)

Extreme ultraviolet and soft X-ray imaging with compact, table top laser plasma EUV and SXR sources

“…In addition, EUV microscopy uses EUV photons as carriers of information, requires no special preparation of the sample prior to imaging, as in the case of SEM. The results of this experiment are presented in [19]. We also imaged similar nanofibers placed on top of a silicon nitride membrane, Fig.…”