2001
DOI: 10.1016/s0304-3991(01)00090-0
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Imaging columns of the light elements carbon, nitrogen and oxygen with sub Ångstrom resolution

Abstract: It is reported that lattice imaging with a 300 kV field emission microscope in combination with numerical reconstruction procedures can be used to reach an interpretable resolution of about 80 pm for the first time. A retrieval of the electron exit wave from focal series allows for the resolution of single atomic columns of the light elements carbon, nitrogen, and oxygen at a projected nearest neighbor spacing down to 85 pm. Lens aberrations are corrected on-line during the experiment and by hardware such that… Show more

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Cited by 147 publications
(93 citation statements)
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References 41 publications
(44 reference statements)
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“…Further, the resolution in reconstructed exit wave images is given by the microscopes information limit, which can exceed the Scherzer point resolution by a factor of more than 2 [26]. Therefore, sub-Ångstrom resolution can be achieved [27,28] and dislocation cores in <110> oriented semiconductors can be imaged with truly atomic resolution, which was not possible before since their dumbbell spacing in <110> projection is often smaller (< 0.15 nm) than the typical 0.18 nm Scherzer point resolution of traditional phase contrast microscopes [27]. Moreover, residual lens aberration can be corrected by numerical phase plates in the exit wave reconstruction process [24].…”
Section: Instrumental Improvementsmentioning
confidence: 99%
See 1 more Smart Citation
“…Further, the resolution in reconstructed exit wave images is given by the microscopes information limit, which can exceed the Scherzer point resolution by a factor of more than 2 [26]. Therefore, sub-Ångstrom resolution can be achieved [27,28] and dislocation cores in <110> oriented semiconductors can be imaged with truly atomic resolution, which was not possible before since their dumbbell spacing in <110> projection is often smaller (< 0.15 nm) than the typical 0.18 nm Scherzer point resolution of traditional phase contrast microscopes [27]. Moreover, residual lens aberration can be corrected by numerical phase plates in the exit wave reconstruction process [24].…”
Section: Instrumental Improvementsmentioning
confidence: 99%
“…If defects are imaged with sub-Ångstrom resolution they must reside in crystals that are thinner than 10 nm [27]. Consequently, only a few thousand atoms are in the proximity of the defect.…”
Section: Instrumental Improvementsmentioning
confidence: 99%
“…Figure 9 depicts the phase of the electron exit wave function for the disconnection r b 3 / 4 . In one part of the image, the atomic columns of oxygen and aluminum are clearly distinguished (inserted magnification) at a spacing of 85 pm [12]. In the vicinity of the disconnection, the (Fig.…”
Section: -3-disconnection Core Structurementioning
confidence: 96%
“…The sample was finally annealed under high vacuum (10 -6 Torr) in order to prevent further contamination under the electron beam in the microscope. reconstructed from a focal series of 20 lattice images recorded on a CM300 FEG/UT instrument with a 0.8 Å information limit [12]. The image simulations were performed by multislice calculations with the MacTempas and CrystalKit software packages [13].…”
Section: -Experimentalmentioning
confidence: 99%
“…For conventional TEM imaging, aberration correction is achieved with a double hexapole system and utilizes a tilt series of diffractograms, again relying on the availability of a thin amorphous film [14]. Aberration correction can also be tackled using a posteriori methods, such as exit-wave reconstruction based on through-focal image-series [7,8]. Similar resolution enhancements have been achieved using atomic-resolution electron holography [15].…”
mentioning
confidence: 99%