Image‐based hysteresis modeling and compensation for an AFM piezo‐scanner

Zhang, Yudong; Fang, Yongchun; Zhou, Xia; Dong, Xiaokun

doi:10.1002/asjc.92

Cited by 30 publications

(14 citation statements)

References 20 publications

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“…However, the structural vibration dynamics as well as the hysteresis nonlinearity are the main factors that limit its further applications [20]- [22]. In the z-axis of a typical piezo-tube scanner utilized in an AFM system, since the displacement is comparatively small, the hysteresis behavior is not remarkable.…”

Section: A Piezo-scanner Dynamicsmentioning

confidence: 99%

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AM-AFM System Analysis and Output Feedback Control Design With Sensor Saturation

Fang

Zhang

et al. 2013

IEEE Trans. Nanotechnology

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This paper analyzes the dynamics of an amplitudemodulation atomic force microscopy (AM-AFM) system, and designs a novel output feedback robust adaptive control (OFRAC) law to improve the scanning performance of the AM-AFM system. That is, a control-oriented reduced model is proposed to approximate the mapping from tip-sample separation to oscillation amplitude, whose accuracy is verified by experimental results. Considering the facts that the parameters of an AM-AFM system vary with different combinations of piezo-scanner and cantilever as well as detected samples, and measurement saturation occurs frequently in dynamic AFM systems, an OFRAC strategy for the piezo-scanner is designed to keep the oscillation amplitude of the cantilever staying at the desired setpoint under various complex situations. It is shown theoretically that the proposed control strategy pushes the system away from the saturation state in finite time, and it ensures uniform ultimate boundedness result for the control error. The OFRAC strategy is applied to a virtual AM-AFM system, and the collected results clearly demonstrate that it presents superior imaging performance for high-speed scanning tasks.

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Section: A Piezo-scanner Dynamicsmentioning

confidence: 99%

“…where the fact of sgn(e ) = sgn(e) from (18)- (20) has been utilized. For system (40) with unknown parameter vector Φ and bounded disturbance Δ, the following robust adaptive control law is designed to deal with these model uncertainties:…”

Section: B Robust Adaptive Controller Designmentioning

confidence: 99%

AM-AFM System Analysis and Output Feedback Control Design With Sensor Saturation

Fang

Zhang

et al. 2013

IEEE Trans. Nanotechnology

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“…An AFM system is mainly composed of four parts: piezoelectric scanner, cantilever and probe system, laser detecting system, and controller [14]. An atomic force microscope obtains atomic resolution topography by using a nano-sized probe to detect tiny sample's surface, and its basic working principle is described in followings:…”

Section: A the Working Principle Of Afmmentioning

confidence: 99%

“…A three-dimensional piezoelectric scanner is usually employed in the AFM system to carry the sample material in the 3-D directions. Piezoelectric actuator has the advantages of fast response, high positioning precision, insensitive to temperature changes or the magnetic field effect [1], etc. Therefore, it is a hot research topic in recent years.…”

Section: Introductionmentioning

confidence: 99%

Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images

Tang

Zhao

2011

2011 IEEE International Conference on Mechatronics and Automation

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Atomic force microscope(AFM) is a very important instrument with atomistic level resolution, which has been widely employed in the field of micro/nano technology. As a critical part of AFM system, the piezoelectric scanner exists many defects such as hysteresis, creep, and ease of vibration effects, which has become a bottleneck in its further development and application. In this paper, an image-based method by using polar coordinate is presented to model the piezoelectric scanner utilized in AFM, which can effectively avoid the troubles of data acquisition in AFM system. The parameters of its inverse model are identified by the Least-square method(LSM) and an inverse feedforward control strategy is developed. To verify the performance of this strategy, Being CSPM5500 AFM has been employed, the analysis and performance evaluation have been conducted in detail, which demonstrates that the novel hysteresis model and the image-based inverse feedforward control strategy presented in this paper possess a good performance for AFM nano imaging.Index Terms-Hysteresis modeling, feedforward control, atomic force microscope(AFM), polar coordinate, nano imaging.

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“…Image-based methods that correct for probe-position error have focused on the correction of errors in one-axis of the SPM. For example, methods have been developed to correct for relatively low-speed effects such as DC-gain [10], drift [11], and hysteresis [12], as well as higher speed, dynamic effects [13]- [15]. In the higher-speed methods, distortions in high-speed SPM images of standard calibration samples are used to determine the trajectory followed by the SPM probe while the image was being acquired -the distortions are caused by an inability to track the desired trajectory during high speed operation.…”

Section: Introductionmentioning

confidence: 99%

Two axis image-based measurement and control for scanning probe microscopes

McManus

2011

2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)

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In this paper, a method for the image-based position measurement of both lateral axes of a scanning probe microscope (SPM) is presented. SPM systems have applications in a broad range of fields, but the operation speed of these devices is limited due to the resonant nature of the nanopositioner (typically piezoelectric) used to position the SPM probe above the sample surface. To overcome this issue a number of feedback and feedforward controllers have been successfully applied. One difficulty in applying these controllers is that they typically require probe-position sensors, which have a number of difficulties including limited resolution and sensor integration. To address these sensor issues, an image-based sensing method, capable of simultaneous measurement of both lateral positions (x and y) of the SPM, is presented and used to enable feedforward control. Specifically, in this method, the trajectory followed while imaging at high-speeds can be determined by analyzing the acquired image. This measured trajectory can then be used to develop a feedforward input that will compensate for the SPM dynamics. To verify the method, simulation results are presented.

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Image‐based hysteresis modeling and compensation for an AFM piezo‐scanner

Cited by 30 publications

References 20 publications

AM-AFM System Analysis and Output Feedback Control Design With Sensor Saturation

AM-AFM System Analysis and Output Feedback Control Design With Sensor Saturation

Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images

Two axis image-based measurement and control for scanning probe microscopes

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