Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images

Abstract

Atomic force microscope(AFM) is a very important instrument with atomistic level resolution, which has been widely employed in the field of micro/nano technology. As a critical part of AFM system, the piezoelectric scanner exists many defects such as hysteresis, creep, and ease of vibration effects, which has become a bottleneck in its further development and application. In this paper, an image-based method by using polar coordinate is presented to model the piezoelectric scanner utilized in AFM, which can effectively avoid the troubles of data acquisition in AFM system. The parameters of its inverse model are identified by the Least-square method(LSM) and an inverse feedforward control strategy is developed. To verify the performance of this strategy, Being CSPM5500 AFM has been employed, the analysis and performance evaluation have been conducted in detail, which demonstrates that the novel hysteresis model and the image-based inverse feedforward control strategy presented in this paper possess a good performance for AFM nano imaging.Index Terms-Hysteresis modeling, feedforward control, atomic force microscope(AFM), polar coordinate, nano imaging.

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“…1, AFM scanners also possess cross-coupling effect between XY -plane and Z-axis. The cross-coupling effect will not only disarrange the scans but also introduce artifacts in the image which can be mistaken for roughness or bumps in the sample surface [2]. According to our experience, AFM is usually performed at low scanning frequency (generally 1-2 Hz) since the cross-coupling effect is less significant in this condition.…”

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