Identification model-based control system design for semiconductor manufacturing equipment

Hashimoto, Seiji; Nitta, Mayumi; Shimosakai, K.; Konuma, M.

doi:10.1109/iciea.2009.5138494

Cited by 4 publications

(2 citation statements)

References 9 publications

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“…The authors have been proposed the disturbance observer based internal model control (DIMC) [7],which is the model based control method based on IMC [8]- [10]. The block diagram of DIMC is shown in Fig.…”

Section: B Control System Designmentioning

confidence: 99%

Adaptive Identification and Control for Digital Control-Based Switching Power Supply System

Hashimoto

Sato

Naka

et al. 2012

2012 Asia-Pacific Power and Energy Engineering Conference

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Digital control of a general-purpose switching power supply is one of the key technologies to perform the high reliability and the intelligent functions demanded for the next generation. In this paper, the experimental identification method is firstly applied to the developed digital control-based switching power supply. Based on the identified model, the model-based control system is constructed. Considering the load variations, the adaptive mechanism is introduced to the control system. The effectiveness of the proposed identification and control strategies is evaluated through simulations and experiments with the developed switching power supply system.

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Section: B Control System Designmentioning

confidence: 99%

Adaptive Identification and Control for Digital Control-Based Switching Power Supply System

Hashimoto

Sato

Naka

et al. 2012

2012 Asia-Pacific Power and Energy Engineering Conference

Self Cite

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show abstract

“…By introducing the system identification and the internal model control strategies [1]- [7] to the developed power supply, the high performance voltage control system can be designed. In addition, the output voltage vibration due to the digital control is quantitatively analyzed and compensated.…”

Section: Introductionmentioning

confidence: 99%

Development of intelligent switching power supply based on advanced digital control

Hashimoto

Naka

Toya

et al. 2010

2010 5th IEEE Conference on Industrial Electronics and Applications

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Digital control of a general-purpose switching power supply is one of the key technologies to perform the high reliability and the intelligent function demanded for the next generation. The contribution of this paper is the development of a digital control-based switching power supply with the ability to overcome future's requirements such as fault detection, life-time estimation and self recovery. For the developed digital controlbased equipment, at first, the system identification strategy is introduced. Based on the identified model, the proposed internal model control with the disturbance observer (DIMC) is applied. The advantage of the proposed DIMC is that the design parameter is only the control bandwidth. The validity of the proposed digital control strategy is confirmed by the experiments. Moreover, the quantitative evaluation of output voltage vibration due to the digital control is investigated, and then the compensation method based on the voltage reference modification is proposed and evaluated through the experiments.

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Modeling and analysis of a multi-dimensional vibration isolator based on the parallel mechanism

Zhao

Deng

2012

Journal of Manufacturing Systems

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Identification model-based control system design for semiconductor manufacturing equipment

Cited by 4 publications

References 9 publications

Adaptive Identification and Control for Digital Control-Based Switching Power Supply System

Adaptive Identification and Control for Digital Control-Based Switching Power Supply System

Development of intelligent switching power supply based on advanced digital control

Modeling and analysis of a multi-dimensional vibration isolator based on the parallel mechanism

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