Identification and elimination of trench crystal defects in sub-0.13-μm era

Yeh, C. P.; Chen, Chung-Chen; Lu, T.S.; Shen, Chia-Ming; Chuang, Jong-Hsian; Lee, Jon; Fu, Chin-Ming; Sheu, Ya-Dien

doi:10.1117/12.521724

SPIE Proceedings

2004

DOI: 10.1117/12.521724

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Identification and elimination of trench crystal defects in sub-0.13-μm era

C. P. Yeh

Chung-Chen Chen

T.S. Lu

et al.

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Identification and elimination of trench crystal defects in sub-0.13-μm era

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